Force Sensor 1 / 18 Rev.2.3 HSFPAR004A Datasheet Mar/26/2019 Force Sensor HSFPAR004A Data sheet 1. HSFPAR004A Product No. 2. General description This product is a force sensor using effect of piezo resistive bridge circuit formed on silicon diaphragm. Piezo resistance is changed according to strain by applying force to the diaphragm. 3. Feature PKG 0.01N 100 Small Footprint and Low Profile User design flexibility by small package. High Sensitivity and Good Linearity Precisely detect micro force less than 0.01 N. High Durability No characteristics change after 1 million cycles. HEAD OFFICE 1-7, YUKIGAYA-OTSUKA-MACHI, OTA-KU, TOKYO, 145-8501, JAPAN PHONE +81(3)3726-1211 FAX +81(3)3728-1741 NAGAOKA PLANT 1-3-5, HIGASHITAKAMI-MACHI, NAGAOKA-CITY, NIIGATA-PREF, 940-0006, JAPAN PHONE +81 258-24-4111 FAX +81 258-24-4110 This specification is subject to change without notice.Force Sensor 2 / 18 Rev.2.3 HSFPAR004A Datasheet Mar/26/2019 4. Sensor structure and measurement principle Fig-1 sensor package and sensor element Piezo Vdd Vout2 element Vdd Vout2 A:Up A D:Down B:Down B D C C:Up Vout1 GND GND Vout1 Fig-2 sensor structure Force (N) Piezo element Diaphragm Fig-3 measurement principle (1) Diaphragm is strained by getting force from outside. (2) Resistance of Piezo element on the diaphragm is changed by getting the strain diaphragm deformation 3) Analog voltage is outputted in response to the force change. (Vout=Vout1-Vout2)