Precision Triaxial Inclinometer and Accelerometer with SPI Data Sheet ADIS16210 FEATURES GENERAL DESCRIPTION Triaxial, digital inclinometer system The ADIS16210 iSensor is a digital inclinometer system that 180 measurement range, roll and pitch axes provides precise measurements for both pitch and roll angles 90 gravity axis over a full orientation range of 180. It combines a MEMS tri- 0.1 relative accuracy axial acceleration sensor with signal processing, addressable user Triaxial, digital accelerometer, high accuracy registers for data collection/programming, and a SPI-compatible 1.7 g measurement range serial interface. In addition, the production process includes unit 0.05 axis-to-axis alignment specific calibration for optimal accuracy performance. It also Digital internal temperature measurements offers digital temperature sensor and power supply measurements Digital internal power supply measurements together with configuration controls for in-system calibration, Programmable user calibration options sample rate, filtering, alarms, input/output (I/O) configuration, Single command, frame alignment and power management. Manual accelerometer bias correction The MEMS sensor elements are bound to an aluminum core for Programmable operation and control tight platform coupling and excellent mechanical stability. An Sample rate/filtering internal clock drives the data sampling system, which eliminates Alarm conditions and indicator output the need for an external clock source. The SPI and data buffer Input/output: data ready, alarm, general-purpose structure provide convenient access to accurate sensor data and Power management functions configuration controls. SPI-compatible serial interface The ADIS16210 is available in a 15 mm 24 mm 15 mm Serial number and device ID module that provides mounting tabs with M2-sized mounting Single-supply operation: 3.0 V to 3.6 V holes and a flexible, edge terminated connector interface. It has Calibrated temperature range: 40C to +85C an extended operating temperature range of 40C to +125C. 15 mm 24 mm 15 mm package with flexible connector APPLICATIONS Platform control, stabilization, and alignment Tilt sensing, inclinometers, and leveling Motion/position measurement Monitor/alarm devices (security, medical, safety) Navigation FUNCTIONAL BLOCK DIAGRAM DIO1 DIO2 RST VDD ADIS16210 POWER SELF TEST I/O ALARMS GND MANAGEMENT TRIAXIAL MEMS SENSOR CS CONTROL CONTROLLER REGISTERS SCLK SPI TEMPERATURE PORT SENSOR CORRECTION DIN DIGITAL OUTPUT INCLINE AND FILTER REGISTERS CALIBRATION ALIGNMENT DOUT SUPPLY Figure 1. Rev. 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Technical Support www.analog.com Trademarks and registered trademarks are the property of their respective owners. 09593-001ADIS16210 Data Sheet TABLE OF CONTENTS Features .............................................................................................. 1 System Tools .................................................................................... 15 Applications ....................................................................................... 1 Global Commands ..................................................................... 15 General Description ......................................................................... 1 Input/Output Functions ............................................................ 15 Functional Block Diagram .............................................................. 1 Device Identification .................................................................. 16 Revision History ............................................................................... 2 Status/Error Flags ....................................................................... 16 Specif icat ions ..................................................................................... 3 Flash Memory Management ..................................................... 16 Timing Specifications .................................................................. 4 Alarms .............................................................................................. 17 Absolute Maximum Ratings ............................................................ 5 System Alarm .............................................................................. 17 ESD Caution .................................................................................. 5 Static Alarms ............................................................................... 17 Pin Configuration and Function Descriptions ............................. 6 Dynamic Alarms ........................................................................ 17 Basic Operation ................................................................................. 7 Alarm Reporting ........................................................................ 17 Reading Sensor Data .................................................................... 7 Applications Information .............................................................. 18 Device Configuration .................................................................. 7 Mating Connector ...................................................................... 18 User Register Map ............................................................................ 8 Breakout Board ........................................................................... 18 Sensor Data ........................................................................................ 9 PC-Based Evaluation Tools ....................................................... 18 Output Data Registers .................................................................. 9 Outline Dimensions ....................................................................... 20 Signal Processing, Bias Correction, and Alignment .................. 12 Ordering Guide .......................................................................... 20 REVISION HISTORY Change to Figure 5 ............................................................................ 7 3/2019Rev D to Rev. E Changes to User Register Map Section and Table 8 ...................... 8 Added Endnote 1 to Inclinometers, Relative Accuracy Changes to Signal Processing, Bias Correction, and Alignment Parameter, Table 1 Renumbered Sequentially ............................. 3 Section, Figure 16, and Accelerometer Bias Correction Section .. 12 Changes to Table 31 Title to Table 33 Title ................................. 14 Added Table 27, Table 28, and Table 29 Renumbered Added X-Ray Sensitivity Section .................................................. 19 Sequentially ..................................................................................... 12 Changes to Ordering Guide .......................................................... 21 Changes to Table 30 and Measurement Mode Section ............. 13 Added Two-Axis Mode Section.................................................... 13 3/2018Rev C to Rev. D Added User Reference Alignment Section, Table 31, Table 32, Changes to Figure 4 .......................................................................... 6 and Table 33 .................................................................................... 14 Deleted Interface Board Section, Figure 23, and Figure 25 Change to Table 34 ......................................................................... 15 Renumbered Sequentially .............................................................. 18 Moved User Register Save to Flash Memory Section and Added Breakout Board Section, PC-Based Evaluation Tools Figure 20 .......................................................................................... 15 Section, and Figure 24 Renumbered Sequentially .................... 18 Changes to Figure 25 ...................................................................... 18 Added Figure 25 .............................................................................. 19 Changes to Ordering Guide .......................................................... 20 6/2011Rev. 0 to Rev. A Changes to Table 1 ............................................................................. 3 12/2016Rev. B to Rev. C Changes to Table 23 ....................................................................... 12 Changes to Signal Processing, Bias Correction, and Alignment Changes to Figure 24 and Figure 25............................................. 17 Section .............................................................................................. 12 4/2011Revision 0: Initial Version 6/2015Rev. A to Rev. B Changes to Figure 2 .......................................................................... 4 Rev. E Page 2 of 20