KXD94 Series Accelerometers and Inclinometers FEATURES MARKETS APPLICATIONS Small Package - 5x5x1.2mm DFN Multiplexed Analog Output Automotive Internal 1KHz Low Pass Filter Active Suspension Low Noise Stability Control Telematics/GPS Lead-free Solderability Excellent Temperature Performance Industrial High Shock Survivability Platform Stabilization Drill Orientation Low Power Consumption Event Detection User Definable Bandwidth Vibration Analysis Factory Programmable Offset and Sensitivity Appliance Monitoring Self-test Function PROPRIETARY TECHNOLOGY These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXD94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.5 5.25V. Sensitivity is factory programmable for applications requiring from 5.0g to 15.0g ranges. Sensor bandwidth is user-definable. The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog out- put voltage, which is proportional to acceleration. The sense element de- sign utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. 36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info kionix.com Kionix is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided Kionix 2010 All Rights Reserved in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution. July 27, 2010 Rev. 1.2 No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product Page 1 of 2 specifications or discontinue this product at any time without prior notice. KXD94 Series Accelerometers and Inclinometers PERFORMANCE SPECIFICATIONS The performance parameters below are programmed and tested at 5.0 volts. PERFORMANCE SPECIFICATIONS PARAMETERS UNITS KXD94-2802 KXD94-7228 CONDITION Range g 10 13 Factory programmable 0g Offset vs. Temp. mg/C 1.0 typical Sensitivity vs. Temp %/C 0.01 Noise Density g / Hz 100 typical On filter pins 1 Bandwidth Hz 800 typical -3dB Non-Linearity % of FS 0.1 typical % of full scale output Ratiometric Error % 0.2 (XY) 0.1 (Z) 0.5 typical 5.0V 5% Cross-axis Sensitivity % 2.0 typical Power Supply V 5.0 typical Standard mA 1.20 typical 1.10 typical Operating Current Consumption A 5 max Standby ENVIRONMENTAL SPECIFICATIONS PARAMETERS UNITS KXD94-2802 KXD94-7228 CONDITION -40 to +85 (Consumer/ -40 to +125 Operating Temperature C Powered Industrial) (Automotive) Storage Temperature C -55 to 150 Unpowered Powered and unpowered, Mechanical Shock g 5000 0.5 msec halversine ESD V 3000 Human body model NOTE 1 Internal 1 KHz low pass filter. Lower frequencies are user definable with external capacitors. ORDERING GUIDE Axis(es) of Range Sensitivity Operating Voltage Temperature Product Offset (V) Package Sensitivity (g) (mV/g) (V) (C) KXD94-2802 XYZ 10 200 2.5 5.0 -40 to +85 5x5x1.2 DFN KXD94-7044 X 13 150 2.5 5.0 -40 to +125 5x5x1.2 DFN KXD94-7138 X 5 400 2.5 5.0 -40 to +125 5x5x1.2 DFN KXD94-7228 XYZ 13 150 2.35 (X) 2.5 (Y, Z) 5.0 -40 to +125 5x5x1.2 DFN Kionix 2010 All Rights Reserved July 27, 2010 Rev. 1.2 Page 2 of 2