PART NUMBER: 2g Tri-axis Digital Accelerometer KXUD9-1026 Rev. 3 Specifications Sep-2010 Product Description The KXUD9 is a tri-axis silicon micromachined accelerometer with a user selectable full-scale output range of 2g, 4g, 6g or 8g. The sense element is fabricated using Kionixs proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration- induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning, self-test, and temperature compensation. The accelerometer is delivered in a 3 x 3 x 0.9 mm LGA plastic package operating from a 1.8 3.6V DC supply. 2 Either I C or SPI interfaces can be used to communicate to the chip to trigger A/D conversions or manage power consumption. Functional Diagram X Sensor Y Charge LPF Sensor Amp Z Temp Sensor Sensor 5 Vdd A/D 2 SPI/I C 1 IO Vdd 3 AUX IN GND 4 6 8 9 10 7 36 Thornwood Dr. Ithaca, NY 14850 2010 Kionix All Rights Reserved tel: 607-257-1080 fax:607-257-1146 327-1698-1008241828 www.kionix.com - info kionix.com Page 1 of 23 PART NUMBER: 2g Tri-axis Digital Accelerometer KXUD9-1026 Rev. 3 Specifications Sep-2010 Product Specifications Table 1. Mechanical (specifications are for operation at 2.6V and T = 25C unless stated otherwise) Parameters Units Min Typical Max Operating Temperature Range C - -40 85 Zero-g Offset counts 1905 2048 2191 Zero-g Offset Variation from RT over Temp. mg/C 0.5 FS1=1, FS0=1 ( 2g) 794 819 844 FS1=1, FS0=0 ( 4g) 390 410 430 1 Sensitivity counts/g FS1=0, FS0=1 ( 6g) 257 273 289 FS1=0, FS0=0 ( 8g) 189 205 221 0.01 (xy) Sensitivity Variation from RT over Temp. %/C 0.04 (z) Offset Ratiometric Error (V = 2.6V 5%) % dd 0.4 Sensitivity Ratiometric Error (V = 2.6V 5%) % dd 0.7 1.2 (x) Self Test Output change on Activation g 1.1 (y) 0.9 (z) 3500 (xy) 2 Mechanical Resonance (-3dB) Hz 1800 (z) Non-Linearity % of FS 0.1 Cross Axis Sensitivity % 2 Noise Density (on filter pins) g / Hz 750 Notes: 1. User selectable from CTRL REGC 2. Resonance as defined by the dampened mechanical sensor. 36 Thornwood Dr. Ithaca, NY 14850 2010 Kionix All Rights Reserved tel: 607-257-1080 fax:607-257-1146 327-1698-1008241828 www.kionix.com - info kionix.com Page 2 of 23