PART NUMBER: KXR94-1071 4g Tri-axis Accelerometer Rev. 2 Specifications May-2014 Product Description The KXR94-1071 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-4g (39.2 m/s/s). The sense element is fabricated using Kionixs proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 5.25V DC supply. There are 4 factory programmable modes of operation for the KXR94: Mode 00 The three outputs (X, Y, Z) are read through the digital SPI interface, which is also used to command Selftest and Standby Mode. The digital I/O pads are powered from a separate power pin, and will interface to 1.8V logic. Mode 01 The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must be high for normal operation and low for power shutdown. Mode 10 The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be high for normal operation and low for power shutdown. Mode 11 The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be low for normal operation and high for power shutdown. The KXR94-1071 is factory programmed to be in MODE 10. 36 Thornwood Dr. Ithaca, NY 14850 2014 Kionix All Rights Reserved tel: 607-257-1080 fax:607-257-1146 634-4464-1405091143 www.kionix.com - info kionix.com Page 1 of 13 Not Recommended for New DesignsPART NUMBER: KXR94-1071 4g Tri-axis Accelerometer Rev. 2 Specifications May-2014 Functional Diagram Output X Charge 32K X 2 Amplifier Sensor C 2 Self Temp 10 Test Sensor Y Output Y 32K Charge 1kHz Sensor 13 Amplifier LPF C 3 Z Output Z 32K Charge Sensor 14 Amplifier C4 Oscillator Vdd 8 GND 12 Mux 4 Aux In Logic 3 GND 9 11 6 7 5 Enable NC S0 S1 Vmux 36 Thornwood Dr. Ithaca, NY 14850 2014 Kionix All Rights Reserved tel: 607-257-1080 fax:607-257-1146 634-4464-1405091143 www.kionix.com - info kionix.com Page 2 of 13 Not Recommended for New Designs