KXTH9-2083-FR Kionix

PART NUMBER: 2.5g Tri-axis Analog KXTH9-2083 Rev. 3 Accelerometer Specifications Sep-2011 Product Description The KXTH9-2083 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2.5g (24.5 m/s/s). The sense element is fabricated using Kionixs proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 3 x 3 x 0.9mm Land Grid Array (LGA) plastic package operating from a 1.8 3.6 V DC supply. The KXTH9 features a factory programmable low pass filter. There are 2 factory programmable modes of operation for the KXTH9: Mode 00 The PD pin must be high for normal operation and low for power shutdown. Mode 01 The PD pin must be low for normal operation and high for power shutdown. The KXTH9-2083 is factory programmed to be in MODE 01. 36 Thornwood Dr. Ithaca, NY 14850 2010 Kionix All Rights Reserved tel: 607-257-1080 fax:607-257-1146 453-2470-1102251332 www.kionix.com - info kionix.com Page 1 of 11 PART NUMBER: 2.5g Tri-axis Analog KXTH9-2083 Rev. 3 Accelerometer Specifications Sep-2011 Functional Diagram X Sensor Charge Y LPF Amplifier Sensor Z Sensor Oscillator 3 ST 1 Vdd 9 Logic MUX 7 GND Aux In 4 2 8 6 S0 S1Vmux PD 36 Thornwood Dr. Ithaca, NY 14850 2010 Kionix All Rights Reserved tel: 607-257-1080 fax:607-257-1146 453-2470-1102251332 www.kionix.com - info kionix.com Page 2 of 11