Low Cost 1.5 g Tri Axis Accelerometer with Ratiometric Outputs MXR9500G/M FEATURES Low cost RoHS compliant Gain Adjust Temp A/D D/A Xout X LPF Sensor Comp Resolution better than 1 mg Tri-axis accelerometer in a single package. Gain Adjust Temp A/D D/A On chip mixed signal processing Y LPF Yout Comp Sensor No moving parts No loose particle issues Z Gain Adjust Temp A/D D/A LPF >50,000 g shock survival rating Zout Sensor Comp SMT package: 7mm X 7mm X 1.8mm 2.7V to 3.6V single supply continuous operation No adjusting external components needed VSA1 Reference Digital Interface Clock VSA2 APPLICATIONS GPS Electronic Compass Tilt Correction/Navigation VDD1 VDD2 VDD3 DI1 SCK1 DI2 SCK2 Consumer LCD projectors, pedometers, blood pressure monitor, digital cameras/MP3 players FUNCTIONAL BLOCK DIAGRAM Information Appliances Computer Peripherals/PDAs/ Cell Phones Gaming Joystick/RF Interface/Menu Selection/Tilt Sensing The MXR9500G/M provides three ratiometric analog Security Gas Line/Elevator/Fatigue Sensing outputs that are set to 50% of the power supply voltage at zero g. GENERAL DESCRIPTION The MXR9500G/M is a low cost, tri axis accelerometer The Max. noise floor is 1 mg/ Hz allowing signals below fabricated on a standard, submicron CMOS process. It is a 1mg to be resolved at 1 Hz bandwidth. The MXR9500G/M complete sensing system with on-chip mixed signal is packaged in a hermetically sealed, surface mount LCC processing. The MXR9500G/M measures acceleration with 16pins package (7 mm x 7 mm x 1.8 mm height) and is a full-scale range of 1.5 g and a sensitivity of 500mV/g operational over a -40C to +85 C (M) and 0C to +70 C (G) 3.0V at 25 C. It can measure both dynamic acceleration temperature range. (e.g. vibration) and static acceleration (e.g. gravity). The 2 MXR9500G/M design is based on heat convection and I C fast mode interface is soon available in the next generation requires no solid proof mass. This eliminates stiction and chip. particle problems associated with competitive devices and provides shock survival greater than 50,000 g, leading to significantly lower failure rate and lower loss due to handling during PCB assembly and at customer field application. MEMSIC, Inc. Information furnished by MEMSIC is believed to be accurate and reliable. However, One Technology Drive Suite 325,Andover MA01810,USA no responsibility is assumed by MEMSIC for its use, nor for any infringements of Tel: +1 978 738 0900 Fax: +1 978 738 0196 patents or other rights of third parties which may result from its use. No license is www.memsic.com granted by implication or otherwise under any patent or patent rights of MEMSIC. MEMSIC MXR9500G/M Rev.D Page 1 of 8 2/27/2007 MXR9500G/M SPECIFICATIONS (Measurements 25C, Acceleration = 0 g unless otherwise noted VDD1, VDD3 = 3.0V unless otherwise specified) Parameter Conditions Min Typ Max Units 1 Measurement Range Each Axis g 1.5 Nonlinearity Best fit straight line 0.5 1.0 % of FS 2 Alignment Error X, Y-axis degrees 1.0 Z-axis degrees 3.0 3 Transverse Sensitivity 2.0 % Sensitivity 475 500 525 mV/g Sensitivity Change Over Temperature from 25 C 15 % Zero g Offset Bias Level 1.45 1.50 1.55 V -0.1 0.0 +0.1 g Zero g Offset TC from 25 C, based on 500mV/g 1.0 X,Y-axis mg/C 1.5 Z-axis mg/C Normal Output Range Output High 2.8 V Output Low 0.2 V Noise Density, RMS X,Y-axis 0.6 mg/ Hz Z-axis 0.9 mg/ Hz Resolution 1Hz BW 0.5 1 mg Frequency Response -3dB 17 Hz Output Drive Capability 2.7V-3.6V 100 A 4 Turn-On Time 75 mS Operating Voltage Range 2.7 3.0 3.6 V Supply Current 4.2 mA Power Down Current 0.1 uA Operating Temperature Range MXR9500G 0 +70 C MXR9500M -40 +85 C NOTES 1 Guaranteed by measurement of initial offset and sensitivity. 2 Alignment error is specified as the angle between the true and indicated axis of sensitivity. 3 Cross axis sensitivity is the algebraic sum of the alignment and the inherent sensitivity errors. 4 Output settled to within 17mg. MEMSIC MXR9500G/M Rev.D Page 2 of 8 2/27/2007