D6F-A6 MEMS Flow Sensor High-accuracy Sensing with a Compact Body for Flow Rates up to 50 L/min. Accurately measures an air mass flow rate of 10 to 50 L/min. A compact size of 30 78 30 mm (H W D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-10A6-000 D6F-20A6-000 Flow Port Type Applicable fluid Flow rate range Model D6F-10A61-000 D6F-20A61-000 6.0 6.0 0 to 10 L/min D6F-10A6-000 5.0 5.0 Rc 1/4 thread 0 to 20 L/min D6F-20A6-000 4.0 4.0 0 to 50 L/min D6F-50A6-000 3.0 3.0 Air 2.0 2.0 0 to 10 L/min D6F-10A61-000 1.0 1.0 NPT 1/8 thread 0 to 20 L/min D6F-20A61-000 0.0 0.0 0.0 2.0 4.0 6.0 8.0 10.0 0.0 4.0 8.0 12.0 16.0 20.0 0 to 50 L/min D6F-50A61-000 Flow rate (L/min) Flow rate (L/min) D6F-50A6-000 Accessory (Sold separately) D6F-50A61-000 Type Model 6.0 Cable D6F-CABLE1 5.0 4.0 Note: Refer to Accessories for the D6F Series on page 39. 3.0 2.0 1.0 Connections 0.0 0.0 10.0 20.0 30.0 40.0 50.0 D6F-10A6-000 D6F-10A61-000 Flow rate (L/min) D6F-20A6-000 D6F-20A61-000 D6F-50A6-000 D6F-50A61-000 D6F-10A6-000/D6F-10A61-000 Flow rate Pin No. 1: Vcc 0 2.0 4.0 6.0 8.0 10.0 L/min (normal) 2: Vout 3: GND Output voltage 1.00 1.75 2.60 3.45 4.25 5.00 Connector 53398-03** (Made by Molex Japan) V 0.12 0.12 0.12 0.12 0.12 0.12 Use the following connectors for connections to the D6F: D6F-20A6-000/D6F-20A61-000 Housing 51021-0300 (Made by Molex Japan) Flow rate Terminals 50079 (Made by Molex Japan) 0 4 8 12 16 20 L/min (normal) Wires AWG28 to AWG26 Output voltage 1.00 1.93 2.87 3.70 4.41 5.00 2: Vout 3: GND 1: Vcc V 0.12 0.12 0.12 0.12 0.12 0.12 D6F-50A6-000/D6F-50A61-000 Flow rate 0 10 20 30 40 50 L/min (normal) Output voltage 1.00 2.45 3.51 4.20 4.66 5.00 Enlarged View V 0.12 0.12 0.12 0.12 0.12 0.12 Measurement conditions: Power supply voltage of 12 0.1 VDC, ambient temperature of 25 5C, and ambient humidity of 35% to 75%. 16 Output voltage (V) Output voltage (V) Output voltage (V)D6F-A6 MEMS Flow Sensor Characteristics/Performance Model D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 D6F-10A61-000 D6F-20A61-000 D6F-50A61-000 Flow Range (See note 1.) 0 to 10 L/min 0 to 20 L/min 0 to 50 L/min 0 to 10 L/min 0 to 20 L/min 0 to 50 L/min Calibration Gas (See note 2.) Air Flow Port Type Rc 1/4 thread NPT 1/8 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10k min.) Accuracy 3% FS (25C characteristic) Repeatability (See note 3.) 0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k ) Output Voltage (Min.) 0 VDC (Load resistance: 10 k ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS/aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa Pressure Drop (See note 3.) 0.10 kPa 0.28 kPa 1.44 kPa 0.15 kPa 0.52 kPa 2.31 kPa Operating Temperature (See note 4.) 10 to 60C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) 30 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 3% FS for 25C characteristic at an ambient temperature of 10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 103 g Note: 1. Volumetric flow rate at 0C, 101.3 kPa. Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) Note: 4. With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors Mounting Hole Dimensions 120.2 Lot number label Two, 3.2-dia. Holes 0.5 (3.7) 78 660.2 660.05 (6) (30.4) 0.05 12 Two, tapped threads Two, M3 holes, 6 for Rc 1/4 pipes Effective screw depth: 4.5 D6F-10A6-000 D6F-20A6-000 0.5 30 D6F-50A6-000 300.5 Two, tapped threads for NPT 1/8 pipes D6F-10A61-000 0.5 D6F-20A61-000 30 D6F-50A61-000 300.5 17