Reference pressure change DP3 SERIES Digital Pressure Sensor with Auto-reference Function Digital Auto reference High accuracy sensing at all times with auto- reference function * Passed the UL 991 Environment Test * UL 61010C-1 compatible, Passed the UL 991 Environment Test based on SEMI S2-0200. Category applicable for semiconductor manufacturing: TWW2, Process Equipment Conforming to Applicable standards: UL 61010C-1 UL Recognition EMC Directive Additional test / evaluation standards as per intended use: UL991, SEMI S2-0200 Incorporates auto-reference function Unaffected by changes in reference pressure By an external signal, the set (threshold) values are Example of air-leak test corrected by being shifted by an amount equal to the Threshold level pressure change. Hence, judgment by the sensor is Auto-reference function follows reference pressure changes as accurate as before the reference pressure change. OK NG This function is extremely suitable in places having Reference pressure intense variations in the reference pressure or where fine settings are required. NG NG OK NG ReferenceReference ReferenceReference ReferenceReference pressurepressure pressurepressure pressurepressure Pressure sensor not incorporating DP3 series auto-reference function Before reference pressure change After reference pressure change Total cost reduction Till now...one sensor was required for each suction In case of DP3...operation efficiency UP nozzle Since the threshold level can be automatically changed Since the threshold level differs with the suction nozzle, a by the auto-reference function, two suction nozzles can sensor was required for each suction nozzle, increasing be used, alternately, with one sensor. the cost significantly. DP3-80 Suction nozzle for trimmers Atmospheric () pressure MODE Threshold level for suction nozzle for trimmers Suction nozzle for chip components Threshold For chip components level for suction nozzle Electromagnetic valve for chip Vacuum components Before suction Suction OK Suction NG Suction over For trimmers 808 PE DP-M DP3 DP2 DP4 DP5/DPH PRESSURE SENSORS LED Bar Display Digital Display Head-separated Auto-refer- ence inputMODE DDPP22--2200 110011..33kkPPaa OOUUTT11 OOUUTT22 MMOODDEE 00--AADDJJ DP3 Two outputs with four independent settings and four output modes enable control as per your requirement High accuracy high resolution high speed 1 Hysteresis mode 2 Window comparator mode It achieves a 2.5 ms, or less, response time at a high resolution of 1/1,000. The hysteresis of the comparative The comparative outputs can be made It enables highly accurate sensing with its outputs can be set, as desired, with the ON or OFF by a pressure within the set excellent repeatability and temperature set values. range. characteristics. Since Comparative Output 1 can be used as a self-diagnosis output, it is possible to specify the auto-reference input range. Response time Hysteresis Hysteresis Hysteresis 2.5 ms or less Comparative ON ON Comparative Output 1 Output 1 OFF OFF Repeatability Temperature characteristics Hysteresis Hysteresis Hysteresis ON ON Within 0.2 % F.S. 1 digit Within 1 % F.S. Comparative Comparative Output 2 Output 2 OFF OFF (Note) (Note) 0 0 Set Value 1 Set Value 2 Set Value 3 Set Value 4 Note: The response time is 7.5 ms, or less, at the Set Value 1 Set Value 2 Set Value 3 Set Value 4 (P-1) (P-2) (P-3) (P-4) (P-1) (P-2) (P-3) (P-4) time of auto-reference input. High pressure High pressure (Positive pressure type) (Positive pressure type) High vacuum High vacuum (Vacuum pressure type) (Vacuum pressure type) Hysteresis: 1 digit (2 digits when using psi unit) A wide variety of models Note: The auto-reference function acts only on Note: The auto-reference function acts only on Set Value 3 (P-3) and Set Value 4 (P-4) of Set Value 3 (P-3) and Set Value 4 (P-4) of Selection can be made according to Comparative Output 2. Comparative Output 2. mounting method or place of use. Standard type / DP3-2 3 Optimum for leak test 4 Suitable for start-up check Leak test mode Forced output mode This mode is optimally suitable for a The comparative outputs are forcibly leak test since Comparative Output 1 maintained in the OFF state in the can be set to the hysteresis mode and sensing mode, irrespective of the set Comparative Output 2 can be set to the values. window comparator mode. Also, since the comparative outputs can be forcibly made ON or OFF with Hysteresis (Variable) key operation, without actually applying Direct piping Mounting on a ON Comparative pressure, this mode is suitable for an panel Hysteresis Hysteresis Output 1 OFF operation check or a start-up check. (Fixed) (Fixed) Flat type / DP3-4 Light weight type / DP3-80 ON Comparative Press keyMODE Press keyMODE Total weight Output 2 OFF ON Comparative 70 g approx. (Note) 0 Set Value 1 Set Value 2 Set Value 3 Set Value 4 Output 1 (P-1) (P-2) (P-3) (P-4) OFF High pressure ON Comparative (Positive pressure type) Output 2 High vacuum OFF (Vacuum pressure type) Sensing mode Sensing mode Forced output mode Hysteresis (fixed): 1 digit (2 digits when using psi unit) The sensor Note: The auto-reference function acts only on can be Set Value 3 (P-3) and Set Value 4 (P-4) of mounted on Comparative Output 2. Direct mounting on a wall the suction head of a chip mounter. Selection from six pressure units Analog bar display Peak hold / bottom hold display The pressure unit can be selected from Pressure changes can also be displayed The peak value or the bottom value of six different systems to suit your in an analog fashion using LED bars. the varying pressure can be displayed. requirement. Hence, sudden pressure changes can be This function is convenient for finding recognized at a glance. the pressure variation range or for The selectable pressure units differ LED bars indicate the pressure level determining a reference for pressure with the sensor type. When the pres- in steps of 10 % F.S., regardless of settings. sure unit is changed, the measured () the pressure unit. pressure value and the set values () are automatically converted. Analog bar display Digital display International DP3-41 100kPa System of Peak value is displayed if OUT1 OUT2 Peak MODE 0-ADJ Units (SI) key is pressed continuously. value 2 inHg kPa (Note) kgf/cm DP3-41 100kPa Bottom value is displayed if OUT1 OUT2 Bottom MODE mmHg psi bar 0-ADJ key is pressed value continuously. : Vacuum pressure type : Positive pressure type Time Note: MPa in case of DP3-22 and DP3-42. Note: The above graph is for a positive pressure type sensor. 809 Pressure LED Bar Display Digital Display Head-separated PRESSURE SENSORS PE DP-M DP3 DP2 DP4 DP5/DPH