Datasheet SFM3019 series Digital Mass Flow Meter Product Summary SFM3019 is Sensirions solution on providing high volumes of flow meters for medical ventilators in order to support the global pandemic situation due to the Corona virus outbreak. It relies on a modular approach of assembling approved parts with good availability to Sensirion and a high-volume through-put manufacturing. The housing geometry is based on the SFM3000 flow meter hence it remains mechanically compatible to the SFM3000. A flow range from -10slm to +240slm and one directional flow supports high flow applications while still allowing to detect back flows. To minimize pressure-drop the SFM3019 is equipped with one mesh at the inlet. Key characteristics at a glance Benefits of Sensirions CMOSens Technology Flow range up to 240slm Scalability Calibrated for O , air and mixtures thereof High reliability and long-term stability 2 2 I C interface Best signal-to-noise ratio Industry-proven technology with a track record of Low pressure drop across the sensor more than 15 years No recalibration needed Designed for mass production High process capability Content 1. Ordering Information ................................................................ 2 2. Specifications ........................................................................... 2 3. Measurement Mode ................................................................. 5 4. Digital Interface Description ..................................................... 7 5. Package Outline ....................................................................... 14 6. Soldering .................................................................................. 14 7. Label information ...................................................................... 15 8. Shipping Package .................................................................... 15 9. Revision History ....................................................................... 15 10. Important Notices ..................................................................... 16 www.sensirion.com D1 Version 1.01 July 2021 1/16 1. Ordering Information Use the part names and item numbers shown in the following table when ordering the SFM3019. For the latest product information and local distributors, visit www.sensirion.com. Part name Description Order number SFM3019 -10 to 240slm range, with cap 3.000.400 2. Specifications 1 Flow Specification Condition Parameter SFM3019 Units 3 2 Measurement range Air/O : -10 to 240 slm 2 5 4 Max. Typ span (0240slm) 6 2% m.v. 3% 7 span (-100slm) 6 Accuracy 5% 3% m.v. Zero point 3 0.1 (max.) 0.05 (typ.) slm span 6 1.5% 1% m.v. 7,8 Noise Level Zero point 3 0.1 slm Span shift due to temperature variation < 0.5% of reading per 10C Flow step response time ( ) < 3ms 63 Resolution 16 bit Calibrated for O , Air, mixtures O -air 2 2 Air, N O , non-condensing 2, 2 Media compatibility Pressure Drop One mesh version 60slm <80 / 0.32 Pa / inH2O 200slm <500 / 2.0 1 Unless otherwise noted, all sensor specifications are valid at 25C with VDD = 3.3 V and absolute pressure = 966 mbar. 2 For other ranges contact Sensirion 3 In standard liter per minute at 20C and 1013 mbar 4 For Typ a CpK of 0.67 is targeted (95% of sensors within the Typ limit) 5 for Max no sensor measured outside of these limits will be shipped and a CpK of 1.33 is targeted 6 Measured value 7 Span or offset value, whichever is greater 8 Noise Level is defined as standard deviation over individual sensor readings, measured in average till read mode with readout every 3ms. Typ.: average of noise level, Max. > 99% of sensors have a noise level below indicated value www.sensirion.com D1 Version 1.01 July 2021 2/16