Datasheet SFM3400-AW & SFM3400-D Digital Flow Meter for Neonatal/Pediatric Medical Applications Flow range: 33slm (bidirectional) Small dead space < 1ml Single-use (-D) and Re-use (-AW) version Very fast update time (0.5ms) Product Summary The SFM3400 sensor series is Sensirions digital flow meter The SFM3400 series has been designed with the use by designed for neonatal/pediatric medical applications. It medical professionals in mind. It features medical cones measures the flow rate of air, oxygen and other non- for pneumatic connection to standard breathing circuits and aggressive gases with superb accuracy. The special design a mechanical interface for easy and reliable electrical of the flow channel results in a very small dead space. reconnection. The sensor element, signal processing and digital calibration are on a single microchip assuring very Customers have the choice between the single-use fast signal processing time, best-in-class accuracy and SFM3400-D and the multi-use SFM3400-AW with the ability superior robustness to rough handling and adverse to withstand autoclave procedures. Therefore, the conditions. SFM3400 series is extremely well suited for proximal flow measurements in neonatal/pediatric medical ventilation and The well-proven and patented CMOSens sensor other respiratory applications. technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost- sensitive OEM applications. Applications Sensor chip The SFM3400 flow meter features a fifth-generation silicon Proximal flow measurement for infants / neonates sensor chip. In addition to a thermal mass flow sensor Expiratory flow measurement for infants / neonates element, the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing circuitry, and Ventilation & Anesthesia for infants / neonates interface. Due to seamless integration of signal acquisition Respiratory measurements for infants / neonates and processing on the single silicon die significant Metabolic Measurements for infants / neonates performance and cost benefits are achieved. OEM options A variety of custom options can be implemented for high- volume OEM applications (custom flow rates, calibration for other gases, different body form factor, disposable option etc.). Contact us for more information. www.sensirion.com Version 1.2 February 2021 1/7 1 1.1 Physical Specifications Parameter Condition Value Unit 2 Flow Range -33 +33 slm 3 Typical Max 5 6 7 span <33 slm 3 10 % m.v. 4 Accuracy 5 2 offset 0.02 0.05 slm 9 7 span <33slm 0.5% 3.5% % m.v 4, 8 Noise Level 9 2 offset 0.005 0.025 slm span 1% % m.v./ 10C Accuracy shift for deviation from reference temperature 25C offset 0.01 slm / 10C 9 7 span 0.06 0.2 % m.v. Resolution (14bit) 9 2 offset 0.005 0.01 slm 9 5 slm 100 / 0.4 150 / 0.6 Pa / inH O 2 9 Pressure Drop 10 slm 250 / 1.0 300 / 1.2 Pa / inH O 2 9 25 slm 900 / 3.6 1500 / 6.0 Pa / inH O 2 1.2 Ambient conditions Parameter Condition Value Unit Calibrated Temperature Range dry gas +10 +50 C Operating Temperature Range 10-95% rel. hum. (non cond.) +5 +50 C Storage Temperature 10-95% rel. hum. (non cond.) -40 +70 C 15C - 35C 30 - 70 % rel. hum. Shelf Life for SFM3400-D 3 years storage in original packaging Operating Pressure Range absolute 0.54 1.1 bar Burst Overpressure gauge 0.3 bar 1.3 Media compatibility Parameter Value 10 Calibration Air Media Compatibility Air (non-condensing), N , O , other non- aggressive gases 2 2 Wetted Materials -AW Si, Si N , SiO , gold, epoxy, PPSU, silicone 3 4 x Wetted Materials -D Si, Si N , SiO , gold, epoxy, MABS, silicone 3 4 x RoHS, REACH RoHS and REACH compliant 1 Reference conditions are temperature = 25C, absolute pressure = 966 mbar, horizontal flow and Vdd = 5V 2 slm: mass flow measured in liters per minute at standard conditions (T = 20 C, p = 1013.25 mbar) 3 ForMa no sensor measured outside of this limit will be shipped and a CpK of 1.33 is targeted 4 For accuracy, noise level or resolution the total value is the sum of the offset and span values 5 This value corresponds to a CpK of 0.67 (95% of sensors within the Typical limit) 6 Dependent on tracheal tube diameter 7 % m.v. = % measured value = % of reading 8 Noise level defined as standard deviation of individual sensor readings, measured at full sampling rate 9 Average value 10 Contact Sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures www.sensirion.com Version 1.2 February 2021 2/7