SLF3S-0600F Sensirion

SLF3S-0600F Liquid Flow Sensor Made to Measure The Next Level in Liquid Flow Sensing Low flow sensing up to 2000 l/min Calibrated for H O and IPA 2 Temperature compensated Turn down ratio 200:1 or better Very compact and light-weight form factor Response time below 20 ms Product Summary The SLF3S-0600F is Sensirions compact liquid flow sensor designed for high-volume applications. It enables precise and reliable measurements of dynamic liquid flow rates up to 3 ml/min bi-directionally. 2 The SLF3S-0600F sensor features a digital interface (I C) via a 6-pin standard electrical connector. The SLF3S-0600F builds on the latest generation CMOSens sensor chip that is at the heart of Sensirions flow sensing platform and allows achieving an outstanding performance. The patented CMOSens technology combines the sensor element, signal processing and digital calibration on a small CMOS chip. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications. Benefits of Sensirions CMOSens Technology High reliability and long-term stability Best signalto-noise ratio Industry-proven technology with a track record of more than 20 years Designed for mass production and high process capability www.sensirion.com Version 1.0 D1 December 2020 1/20 Contents 1 Sensor Performance 3 2 Specifications 5 3 Sensor Output Signal Description 6 4 Digital Interface Description 10 5 Fluidic Specifications and Connections 15 6 Mechanical Specifications 15 7 Mechanical Mounting of the SLF3S-0600F Sensor 16 8 Ordering Information 18 9 Packaging Information 18 10 Important Notices 19 11 Headquarters and Subsidiaries 20 www.sensirion.com Version 1.0 D1 December 2020 2/20