The EUM139-M264 is a multi-process micro-mechanical integrated circuit manufactured by Teledyne. It is a low-power, highly integrated and cost-effective solution to a variety of motion tracking, control and communications applications. This compact motion tracking IC includes an on-chip microcontroller, a low-power processor, and a 16-bit ADC. It supports a wide range of communication interfaces such as I2C, SPI, UART, and USB, as well as a variety of motion tracking algorithms. The EUM139-M264 is a key component for cost-effective motion tracking applications.