MiCS-6814 Data Sheet 1143 rev 8 The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package. The MiCS-6814 is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors. 10.00 10.00 Ethanol CO CO Hydrogen Features 1.00 H2S 1.00 Methane Methane Ammonia Smallest footprint for compact designs Ammonia Propane Ethanol Hydrogen (5 x 7 x 1.55 mm) 0.10 Propane 0.10 Robust MEMS sensor for harsh environments Iso-butane Iso-butane High-volume manufacturing for low-cost 0.01 0.01 applications 0.1 1 10 100 1000 10000 100000 0.1 1 10 100 1000 10000 100000 Concentration ppm Short lead-times Concentration ppm RED sensor, continuous power ON, 25C, 50% RH 100.00 NO2 10.00 Detectable gases Hydrogen 1.00 NO Carbon monoxide CO 1 1000ppm Nitrogen dioxide NO 0.05 10ppm 2 0.10 Ethanol C H OH 10 500ppm 2 5 Hydrogen H 1 1000ppm 2 0.01 Ammonia NH 1 500ppm 3 0.01 0.1 1 10 100 Methane CH >1000ppm Concentration ppm 4 OX sensor, continuous power ON, 25C, 50% RH Propane C H >1000ppm 3 8 10.0 Iso-butane C H >1000ppm 4 10 1.0 Propane Hydrogen For more information please contact: 0.1 Iso-butane Ethanol info.em sgxsensortech.com Ammonia 0.0 1 10 100 1000 10000 100000 SGX Sensortech, Courtils 1 Concentration ppm CH-2035 Corcelles-Cormondrche NH3 sensor, continuous power ON, 25C, 50% RH Switzerland www.sgxsensortech.com Page 1 of 5 Rs/R0 Rs/R0 Rs/R0 Rs/R0MiCS-6814 Data Sheet 1143 rev 8 Performance RED sensor Characteristic Symbol Typ Min Max Unit RED sensor Sensing resistance in air (see note 1) R - 100 1500 k 0 Typical CO detection range FS 1 1000 ppm Sensitivity factor (see note 2) S - 1.2 50 - 60 Performance OX sensor Characteristic Symbol Typ Min Max Unit OX sensor Sensing resistance in air (see note 1) R - 0.8 20 k 0 Typical NO detection range FS 0.05 10 ppm 2 Sensitivity factor (see note 3) S - 2 - - R Performance NH3 sensor Characteristic Symbol Typ Min Max Unit OX sensor Sensing resistance in air (see note 1) R - 10 1500 k 0 Typical NH detection range FS 1 300 ppm 3 Sensitivity factor (see note 4) S - 1.5 15 - R Notes: 1. Sensing resistance in air R is measured under controlled ambient conditions, i.e. synthetic air at 23 0 5C and 50 10% RH for RED sensor and synthetic air at 23 5C and 5% RH for OX sensor. Sampling test. 2. Sensitivity factor is defined as Rs in air divided by Rs at 60 ppm CO. Test conditions are 23 5C and 50 10% RH. Indicative values only. Sampling test. 3. Sensitivity factor is defined as Rs at 0.25 ppm NO , divided by Rs in air. Test conditions are 23 5C 2 and 5% RH . Indicative values only. Sampling test. 4. Sensitivity factor is defined as Rs in air divided by Rs at 1 ppm of NH . Test conditions are 23 5C 3 and 50 10% RH. Indicative values only. Sampling test. Page 2 of 5