NPH Series Solid State Low Pressure Sensors Applications Features Process control, P-to-I converters Solid state, high reliability Pneumatic control systems Standard TO-8 package suitable for PC board mount HVAC controls Low cost , small size Biomedical: Infusion pumps, sphygmomanometers, respirators Available in gauge, absolute, and differential pressure versions Aerospace: Altimeters, barometers, cabin pressure sensors Media compatible with non-corrosive gases and dry air Computer peripherals Thermal accuracy FSO 0.5% typical Overpressure capability to five times maximum rated pressure Three standard ranges: 0 to 10 inH2O (0 to 25 mbar), 0 to 1 psi (0 to 0.06 bar), and 0 to 5 psi (0 to 0.34 bar) Nonlinearity 0.05% FSO typical Standard 3/16 in OD pressure port Ceramic substrate with temperature compensation resistors Amphenol Advanced SensorsNPH Series Specifications Parameter Value Units Notes Description General Pressure Range 0 to 10 inH2O (0 to 25 mbar) 0 to 2.5 An integrated circuit silicon sensor chip is housed kPa in a standard TO-8 electrical package that is printed 0 to 1 psi (0 to 7 bar) 0 to 7 kPa circuit board mountable. 0 to 5 psi (0 to 0.34 bar) 0 to 30 kPa The latest techniques in micromachining have been (10) Maximum Pressure 5x rated pressure used to ion-implant piezoresistive strain gauges into Electrical 77F (25C) Unless Otherwise Stated a wheatstone bridge configuration that is integrally Input Excitation 1.5 mA 2 mA maximum formed on a micromachined silicon diaphragm. Insulation Resistance 100 M 50 VDC As with all NovaSensor silicon sensors, the NPH Input Impedance 3200 25% Series employs SenStable processing technology, Output Impedance 5000 20% providing excellent output stability. Constant Bridge Impedance 5000 20% current excitation to the sensor produces a voltage Environmental output that is linearly proportional to the input Temperature Range pressure. (9 Operating ) 40 to 257 F (-40C to 125C) Compensated 32 to 158 F (0C to 70C) The user can provide standard signal conditioning Vibration 10 gRMS 20 to 2000Hz circuitry to amplify the 100 mV output signal. The Shock 100 g 11 milliseconds sensor is compatible with most non-corrosive gases 6 Life (Dynamic Pressure 1 x 10 cycles and dry air. Cycle) (1) Mechanical A laser-trimmed, thick-film resistor network on a Weight <0.2 oz (<5 g) hybrid ceramic substrate provides temperature Media Compatibility Non-corrosive gases and clean, dry air compensation. Wetted Materials Top Port Nickel, gold plated Kovar, silicone gel, gold wire, RTV, silicon and glass. Bottom Port (9) Gold plated Kovar, silicon, glass and RTV Parameter Min. Typical Max. Min. Typical Max. Units Notes 2.5 7 & 30 kPa kPa Performance Parameters(7), Compensated(1) Offset -8 2 8 -4 2 4 mV Full Scale (FS) Output 2.5 kPa 25 50 90 mV 2 7 kPa 50 75 150 mV 2 30 kPa 75 100 125 mV 2 Linearity 1.0 0.1 1.0 0.25 0.05 0.25 %FSO 3 Hysteresis & -0.2 0.05 0.2 -0.2 0.05 0.2 %FSO Repeatability NPH Series schematic diagram Thermal Accuracy of -3 0.5 3 -2 0.5 2 %FSO 4 Offset Accuracy of FSO 3 1 3 -1.5 -0.5 1.5 %FSO 4 Thermal 0.75 0.5 0.75 0.5 0.2 0.5 %FSO 5 Hysteresis Short-Term 5 5 V/V 6, 11 Stability of Offset Short-Term 5 5 V/V 6, 11 Stability of FSO 1. Performance with offset, thermal accuracy of offset, and thermal accuracy of FSO compensation resistors. 2. FSO with 1.5mA input excitation. 3. Best fit straight line. 4. 32F to 158F (0C to 70C) with reference to 77F (25C) 5. 32F to 158F (0C to 70C), by design 6. Normalized offset/bridge voltage 100 hrs, typical value, not tested in production. 7. All values measured at 77F (25C) and at 1.5 mA, unless otherwise noted. 8. Reduced performance outside compensation range. 9. Backside differential tube is nickel or Kovar. 10. Top side pressure. 11. Typical specifications are for reference only absolute values may vary.