NPH Series Solid State Medium Pressure Sensors Applications Features Process control, P-to-I converters Solid state, high reliability Pneumatic control systems Standard TO-8 package suitable for PC board mount HVAC controls Low cost , small size Biomedical: Infusion pumps, sphygmomanometers, Available in gauge, absolute, and differential pres- respirators sure versions Aerospace: Altimeters, barometers, cabin pressure Media compatible with non-corrosive gases and dry sensors air Computer peripherals Typical FSO 100 mV 1.5 mA Thermal accuracy FSO 0.4% typical Overpressure capability to five times maximum rated pressure Three standard ranges: 15, 30 and 100 psi (1, 2 and 7 bar) Nonlinearity 0.05% FSO typical Standard 3/16 in OD pressure port Ceramic substrate with temperature compensation resistors Amphenol Advanced SensorsNPH Series Specifications Description An integrated circuit silicon sensor chip is housed in a output stability. Constant current excitation to the sen- standard TO-8 electrical package that is printed circuit sor produces a voltage output that is linearly propor- board mountable. tional to the input pressure. The latest techniques in micromachining have been The user can provide standard signal conditioning cir- used to ion-implant piezoresistive strain gauges into cuitry to amplify the 100 mV output signal. The sensor is a wheatstone bridge configuration that is integrally compatible with most non-corrosive gases and dry air. formed on a micromachined silicon diaphragm. As with A laser-trimmed, thick-film resistor network on a hybrid all NovaSensor silicon sensors, the NPH Series employs ceramic substrate provides temperature compensation. SenStable processing technology, providing excellent Parameter Value Units Notes Parameter Units Min. Type Max. Notes General Performance Parameters(7), Compensated(1), 100, 200 and 700 kPa Pressure Range 0 to 15 psi (0 to 1 bar) 0 to 100 kPa Offset mV 2 1 2 0 to 30 psi (0 to 2 bar) 0 to 200 kPa Full Scale Output mV 75 100 125 2 0 to 100 psi (0 to 7 bar) 0 to 700 kPa Linearity %FSO 0.1 0.05 0.1 3 (8) Maximum Pressure 4x rated pressure Hysteresis and %FSO 0.05 0.01 0.05 Repeatability Electrical 77F (25C) Unless Otherwise Stated Thermal Accuracy of Offset Input Excitation 1.5 mA 2 mA maximum 100 kPa %FSO 0.6 0.4 0.6 4 8 Insulation Resistance 10 50 VDC 200 and 700 kPa %FSO 0.5 0.2 0.5 4 Input Impedance 4000 20% Thermal Accuracy of FSO Output Impedance 5000 20% 100 kPa %FSO 0.6 0.4 0.6 4 Bridge Impedance 5000 20% 200 & 700 kPa %FSO 0.5 0.2 0.5 4 Environmental Thermal Hysteresis %FSO 0.1 0.05 0.1 5 Temperature Range Short-Term V/V 5 6, 11 (9) Operating 40 to 257 F (-40C to 125C) Stability of Offset Compensated 32 to 158 F (0C to 70C) Short-Term V/V 5 6, 11 Vibration 10 gRMS 20 to 2000 Hz Stability of FSO Shock 100 g 11 milliseconds 6 Life (Dynamic 1 x 10 cycles Pressure Cycle) 1. Performance with offset , thermal accuracy of offset , and thermal ac- (1) curacy of FSO compensation resistors. Mechanical 2. FSO with 1.5 mA input excitation. Weight <0.2 oz (<5 g) 3. Best fit straight line. Media Compatibility Non-corrosive gases and clean, dry air 4. 32F to 158F (0C to 70C) with reference to 77F (25C) Wetted Materials 5. 32F to 158F (0C to 70C), by design. Top Port Nickel, gold plated Kovar, silicone gel, gold wire, RTV, silicon and glass. 6. Normalized offset/bridge voltage100 hrs, typical value, not tested in Bottom Port production. Gold plated Kovar, silicon, glass and RTV (10) 7. All values at 77F (25C) and at 1.5 mA, unless otherwise noted. 8. Topside pressure. Backside pressure maximum pressure is 250 psi (17.23 bar) or 4x rated pressure, whichever is less. 9. Reduced performance outside compensation range. 10. Backside differential tube is nickel or Kovar. 11. Typical specifications are for reference only absolute values may vary.