150/Sec Yaw Rate Gyroscope ADXRS623 FEATURES GENERAL DESCRIPTION Complete rate gyroscope on a single chip The ADXRS623 is a complete angular rate sensor (gyroscope) Z-axis (yaw rate) response that uses the Analog Devices, Inc., surface-micromachining High vibration rejection over wide frequency process to create a functionally complete and low cost angular 2000 g powered shock survivability rate sensor integrated with all required electronics on one chip. Ratiometric to referenced supply The manufacturing technique for this device is the same high 5 V single-supply operation volume BiMOS process used for high reliability automotive 40C to +105C operation airbag accelerometers. Self-test on digital command Ultrasmall and light (<0.15 cc, <0.5 gram) The output signal, RATEOUT (1B, 2A), is a voltage proportional Temperature sensor output to the angular rate about the axis that is normal to the top surface RoHS compliant of the package. The output is ratiometric with respect to a pro- Qualified for automotive applications vided reference supply. An external capacitor sets the bandwidth. Other external capacitors are required for operation. APPLICATIONS A temperature output is provided for compensation techniques. Inertial measurement units Two digital self-test inputs electromechanically excite the sensor to Platform stabilization test proper operation of both the sensor and the signal conditioning Robotics circuits. The ADXRS623 is available in a 7 mm 7 mm 3 mm ceramic ball grid array (CBGA) package. FUNCTIONAL BLOCK DIAGRAM +5V (ADC REF) 100nF +5V ST2 ST1 TEMP V RATIO ADXRS623 AV CC 100nF 25k SELF-TEST 25k 25C AGND DEMOD MECHANICAL DRIVE AC VGA SENSOR AMP AMP +5V 180k 1% V DD CHARGE PUMP AND VOLTAGE 100nF REGULATOR PGND CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT 100nF 22nF 22nF C OUT Figure 1. Rev. A Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. rights of third parties that may result from its use. Specifications subject to change without notice. No Tel: 781.329.4700 www.analog.com license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners. Fax: 781.461.3113 2010 Analog Devices, Inc. All rights reserved. 08890-001ADXRS623 TABLE OF CONTENTS Features .............................................................................................. 1 Theory of Operation .........................................................................9 Applications ....................................................................................... 1 Setting Bandwidth .........................................................................9 General Description ......................................................................... 1 Temperature Output and Calibration .........................................9 Functional Block Diagram .............................................................. 1 Calibrated Performance ................................................................9 Revision History ............................................................................... 2 ADXRS623 and Supply Ratiometricity ................................... 10 Specifications ..................................................................................... 3 Null Adjustment ......................................................................... 10 Absolute Maximum Ratings ............................................................ 4 Self-Test Function ...................................................................... 10 Rate-Sensitive Axis ....................................................................... 4 Continuous Self-Test .................................................................. 10 ESD Caution .................................................................................. 4 Outline Dimensions ....................................................................... 11 Pin Configuration and Function Descriptions ............................. 5 Ordering Guide .......................................................................... 11 Typical Performance Characteristics ............................................. 6 Automotive Products ................................................................. 11 REVISION HISTORY 11/10Rev. 0 to Rev. A Change to Features ........................................................................... 1 Change Operating Temperature Range, Table 2 ........................... 4 Added Automotive Products Section........................................... 11 3/10Revision 0: Initial Version Rev. A Page 2 of 12