TM Honeywell Zephyr Digital Airflow Sensors 008268 Issue 5 HAF SeriesHigh Accuracy: 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM Datasheet FEATURES Fast response time (1 ms) allows the customers application to respond quickly to a change in airflow, important in critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications. High stability reduces errors due to thermal effects and null shift, providing accurate readings over time and often eliminating the need for system calibration after PCB mount and periodically over time. High sensitivity at very low flows provides a fast response time at the onset or cessation of flow. High 12-bit resolution increases the ability to sense small airflow changes, allowing customers to more precisely control their application. Wide airflow range: The industrys broadest airflow range measures mass flow with standard flow ranges of 0 to10, 0 to 15, 0 to 20, 0 to 50, 0 to 100, 0 to 200 and 0 SLPM to DESCRIPTION 300 SLPM, or custom flow ranges, increasing the options to Honeywell Zephyr HAF Series sensors provide a digital integrate the sensor into the application. interface for reading airflow over specified full-scale flow and Choice of port styles: Manifold mount, 22 mm OD tapered compensated temperature ranges. The thermally isolated male fitting, and G 3/8 female threaded fitting provide heater and temperature sensing elements help these sensors flexibility to choose the pneumatic connection that is best provide a fast response to air or gas flow. Zephyr sensors are for the customers application. designed to measure mass flow of air and other non-corrosive Linear output provides a more intuitive sensor signal than gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 the raw output of basic airflow sensors, which can help SLPM, 50 SLPM, 100 SLPM, 200 SLPM and 300 SLPM, reduce production costs, design, and implementation time. with custom flow ranges available. The sensors are fully Wide supply voltage range (3 Vdc to 10 Vdc) provides a calibrated and temperature compensated with an onboard flexible regulated power circuit which allows the designer the Application Specific Integrated Circuit (ASIC). The HAF Series flexibility to choose the supply voltage that works best in the >10 SLPM is compensated over the calibrated temperature system. range of 0C to 50C 32F to 122F . The state-of-the-art 2 ASIC-based I C digital output simplifies integration 2 ASIC-based compensation provides digital (I C) outputs with to microprocessors or microcontrollers, reducing PCB a response time of 1 ms. These sensors operate on the heat complexity and component count. transfer principle to measure mass airflow. They consist of RoHS-compliant materials Meet Directive 2002/95/EC. a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors POTENTIAL APPLICATIONS deposited with thin films of platinum and silicon nitride. Medical: Anesthesia delivery machines, ventilators, The MEMS sensing die is located in a precise and carefully ventricular assist devices (heart pumps), spirometers, designed airflow channel to provide repeatable response to laparoscopy flow. Zephyr sensors provide the customer with enhanced Industrial: Analytic instrumentation (spectrometry, reliability, high accuracy, repeatable measurements and the chromatrography), air-to-fuel ratio, fuel cells, fume hoods, ability to customize sensor options to meet many specific gas leak detection, process control gas monitoring, vacuum application needs. The combination of rugged housings with pump monitoring a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 PORTFOLIO standards. The Honeywell Zephyr Digital Airflow Sensors join an extensive line of airflow sensors for potential use in medical, VALUE TO CUSTOMERS Precise measurement: The industrys smallest Total Error industrial, and consumer applications. Band, fast response time, and high accuracy provide precise measurement and high performance in the customers application. Saves time: Configurable and customizable with a choice of port styles simplifies design and reduces production time. Cost-effective: Reduces printed circuit board (PCB) size and overall design and production costs. Sensing and Internet of ThingsTM Honeywell Zephyr Digital Airflow Sensors HAF SeriesHigh Accuracy: 10, 15, 20, 50, 100, 200, 300 SLPM Figure 1. Total Error Band vs. Accuracy Other airflow sensor manufacturers only report on accuracy, while Honeywell reports Total Error Band. Sources of Error Offset Full Scale Span Pressure Non-Linearity Total Accuracy Pressure Hysteresis Error BFSL Pressure Non-Repeatability Band Thermal Effect on Offset Thermal Effect on Span Thermal Hysteresis HIGH ACCURACY TOTAL ERROR BAND (TEB)* Ideal for use in demanding applications that require high Honeywell specifies TEB, the most comprehensive, clear, accuracy. and meaningful measurement that provides the sensors 0%FS to 14.3%FS = 0.5%FS true accuracy (see Figure 1). TEB allows for precise airflow 14.3%FS to 100%FS = 3.5%reading measurement, often ideal for demanding applications with high accuracy requirements for precise airflow measurement. 10, 15, 20, 50, 100, 200 SLPM: 0%FS to 12.5%FS = 0.5%FS 12.5%FS to 100%FS = 4.0%reading 300 SLPM only: 0%FS to 12.5%FS = 0.5%FS 12.5%FS to 66.7%FS = 4.0%reading 66.7%FS to 100%FS = 7.0%reading 1 Table 1. Absolute Maximum Ratings Characteristic Parameter Supply voltage -0.3 Vdc to 11.0 Vdc 2 Voltage on digital I/O output pins -0.3 Vdc to 3.0 Vdc Storage temperature range -40C to 100C -40F to 212F Maximum flow change 10,000 SLPM/s Maximum common mode pressure 4 bar 60 psi at 25C 77F Maximum flow 350 SLPM 1 Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings. 2 Digital I/O pins are diode protected at this voltage up to 2 mA. Digital bus voltage may exceed this value if the maximum digital bus current is limited to 2 mA or less. The maximum bus current is generally determined by the bus pull-up resistors CAUTION CAUTION IMPROPER USE PRODUCT DAMAGE Do not use these products to sense liquid flow. Do not dissamble these products. Failure to comply with these instructions may result in Failure to comply with these instructions may result in product damage. product damage. 2 Sensing and Internet of Things