D6F-A7D/-AB71D MEMS Flow Sensor Digital Compensation for High Accuracy Temperature compensation and linear compensation produce high accuracy (3% RD (25% to 100% FS)). Compact models for 10 to 70 L/min. Reduced piping work with quick-fastening feature. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Characteristics MEMS Flow Sensor D6F-10A7D-000-0 D6F-20A7D-000-0 70000 70000 Joint Applicable fluid Flow rate range Model 60000 60000 0 to 10 L/min D6F-10A7D-000-0 50000 50000 40000 40000 Quick joint P10 0 to 20 L/min D6F-20A7D-000-0 30000 30000 Air 0 to 50 L/min D6F-50A7D-000-0 20000 20000 10000 10000 Quick joint P14 0 to 70 L/min D6F-70AB71D-000-0 0 0 082 10015 10 5 20 Flow rate (L/min) Flow rate (L/min) Accessories (Sold separately) D6F-50A7D-000-0 D6F-70AB71D-000-0 70000 50000 Type Model 60000 40000 Cable D6F-CABLE3 50000 30000 40000 Quick fastener D6F-FASTENER-P10 30000 20000 20000 Pipe fittings D6F-PLG1 10000 10000 Note: Refer to Accessories for the D6F Series on page 39. 0 0 0410 20 30 0 50 0410 20 300 50 6070 Flow rate (L/min) Flow rate (L/min) Connections D6F-10A7D-000-0 Flow rate D6F-10A7D-000-0 0 2 4 6 8 10 L/min (normal) D6F-20A7D-000-0 Output 1024 13024 25024 37024 49024 61024 D6F-50A7D-000-0 (HEX) (0400) (32E0) (61C0) (90A0) (BF80) (EE60) D6F-70AB71D-000-0 Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temper- ature 255C and ambient humidity 35 to 75%RH. Pin No. 1: Vcc Flow rate = (Output value - 1,024)/60,000 x 10 2: SDA 3: SCL D6F-20A7D-000-0 4: GND Flow rate Connector BM04B-GHS (made by J.S.T. Mfg. Co.) 0 4 8 12 16 20 L/min (normal) Use the following connectors for connections to the D6F: Output 1024 13024 25024 37024 49024 61024 Housing GHR-04V-S (made by J.S.T. Mfg. Co.) (HEX) (0400) (32E0) (61C0) (90A0) (BF80) (EE60) Terminals SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temper- Wires AWG26 to AWG30 ature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 20 3: SCL 2: SDA 4: GND 1: Vcc D6F-50A7D-000-0 Flow rate 0 10 20 30 40 50 L/min (normal) Output 1024 13024 25024 37024 49024 61024 (HEX) (0400) (32E0) (61C0) (90A0) (BF80) (EE60) Enlarged View Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temper- ature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 50 D6F-70AB71D-000-0 Flow rate 0 20 40 60 70 L/min (normal) Output 1024 13024 25024 37024 43024 (HEX) (0400) (32E0) (61C0) (90A0) (A810) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temper- ature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 100 20 Output (Count) Output (Count) Output (Count) Output (Count) 64D6F-A7D/-AB71D MEMS Flow Sensor Characteristics/Performance Model D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 D6F-70AB71D-000-0 Flow Range (See note 1.) 0 to 10L/min 0 to 20 L/min 0 to 50 L/min 0 to 70 L/min Calibration Gas (See note 2.) Air Flow Port Type Quick joint P10 Quick joint P14 Electrical Connection Four-pin connector Power Supply 3.0 to 3.6 VDC Current Consumption 10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25C Resolution 15 bit 5%RD (10%F.S. Flow rate < 25%F.S.) 5%RD (10L/min Flow rate < 20L/min) Accuracy (See note 3.) 3%RD (25%F.S. Flow rate 100%F.S.) 3%RD (20L/min Flow rate 70L/min) Response time 90 ms max. Repeatability (See note 4.) 0.3 %RD 0.3%RD 0.5%RD 1.3%RD Interface (See note 5.) I2C Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 100 kPa Pressure Drop (See note 4.) 0.034 kPa 0.083 kPa 0.28 kPa 0.57 kPa Operating Temperature (See note 6.) 10 to +60C Operating Humidity (See note 6.) 35 to 85%RH Storage Temperature (See note 6.) 30 to +80C Storage Humidity (See note 6.) 35 to 85%RH Insulation Resistance Between sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 57.3 g 64.4 g Note: 1. Volumetric flow rate at 0C, 101.3 kPa. Note: 2. Dry gas (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. -10 Operating Temperature 60C Note: 4. Reference (typical) Note: 5. Refer to the D6F- D-000- Application Notes for details. Note: 6. With no condensation or icing. Note: 7. The following custom options are available. Ask your OMRON representative for details. - Temperature measurement - Address settings (up to four addresses) - Fault detection - Threshold setting Communication Serial Interface I2C Slave / Address: HEX : 0x6C Master/Slave BIN : 110 1100 (7bit) Speed mode Fast Mode 400kHz Signal SCL Serial Clock SDA Data Signal 21