D6F-A5 MEMS Flow Sensor High-accuracy Sensing with a Compact Body for Flow Rates Up to 50 L/min. Accurately detects a mass flow rate of 10 to 50 L/min. A compact size of 30 78 30 mm (H W D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-10A5-000 D6F-20A5-000 Flow Port Type Applicable fluid Flow rate range Model 6.0 6.0 0 to 10 L/min D6F-10A5-000 5.0 5.0 4.0 4.0 Manifold Air 0 to 20 L/min D6F-20A5-000 3.0 3.0 0 to 50 L/min D6F-50A5-000 2.0 2.0 1.0 1.0 0.0 0.0 Accessory (Sold separately) 0.0 2.0 4.0 6.0 8.0 10.0 0.0 4.0 8.0 12.0 16.0 20.0 Flow rate (L/min) Flow rate (L/min) Type Model Cable D6F-CABLE1 D6F-50A5-000 6.0 5.0 Connections 4.0 3.0 D6F-10A5-000 2.0 D6F-20A5-000 1.0 D6F-50A5-000 0.0 0.0 10.0 20.0 30.0 40.0 50.0 Flow rate (L/min) Pin No. 1: Vcc 2: Vout D6F-10A5-000 3: GND Flow rate Connector 53398 (Made by Molex Japan) 0 2.0 4.0 6.0 8.0 10.0 L/min (normal) Use the following connectors for connections to the D6F: Output voltage 1.00 1.75 2.60 3.45 4.25 5.00 Housing 51021 (Made by Molex Japan) V 0.12 0.12 0.12 0.12 0.12 0.12 Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 D6F-20A5-000 2: Vout 3: GND Flow rate 1: Vcc 0 4.0 8.0 12.0 16.0 20.0 L/min (normal) Output voltage 1.00 1.93 2.87 3.70 4.41 5.00 V 0.12 0.12 0.12 0.12 0.12 0.12 D6F-50A5-000 Flow rate Enlarged View 0 10 20 30 40 50 L/min (normal) Output voltage 1.00 2.45 3.51 4.20 4.66 5.00 V 0.12 0.12 0.12 0.12 0.12 0.12 Measurement conditions: Power supply voltage of 120.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. 14 Output voltage (V) Output voltage (V) Output voltage (V)D6F-A5 MEMS Flow Sensor Characteristics/Performance Model D6F-10A5-000 D6F-20A5-000 D6F-50A5-000 Flow Range (See note 1.) 0 to 10 L/min 0 to 20 L/min 0 to 50 L/min Calibration Gas (See note 2.) Air Flow Port Type Manifold Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 3% FS (25C characteristic) Repeatability (See note 3.) 0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS/aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa Pressure Drop (See note 3.) 0.8 kPa 2.9 kPa 17.2 kPa Operating Temperature (See note 4.) 10 to 60C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) 30 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 3% FS for 25C characteristic at an ambient temperature of 10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 103 g Note: 1. Volumetric flow rate at 0C, 101.3 kPa. Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) Note: 4. With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-10A5-000 D6F-20A5-000 Mounting Hole Dimensions D6F-50A5-000 Two, 1.40.1 Lot number label Four, 3.2-dia. through holes Four, M3 holes (3.7) 780.5 0.1 0.05 66 66 (6) (30.05) 0.05 14 Two, 5 dia. 6 0.5 30 0.5 30 Cable (Sold separately) D6F-CABLE1 20035 Brown wire 10015 1. Vcc Black wire 2. Vout 3. GND Blue wire 15