MEMS Mass Flow Sensor D6F-P A Compact, High-performance Flow Sensor with Dust Segregation Structure. Built in Dust Segregation System (DSS) with cyclone flow structure, diverts particulates from sensor element. High resolution and repeatability, even at low flow rates. Barbed ports with connector or PCB terminals, or manifold mount with connector versions. Built in voltage regulator, temperature compensation and amplified output. Measure up to 200 LPM with a bypass setup. High accuracy of 5% FS. RoHS Compliant Ordering Information Description Case Calibration Gas Flow Range Mounting Connection Model (See note 1.) Method Flow Sensor PBT Air (See note 2.) 0-0.1 LPM Flange mount Lead terminals D6F-P0001A1 0-1 LPM D6F-P0010A1 Connector D6F-P0010A2 Manifold mount Connector D6F-P0010AM2 Cable Connector Assembly - - - - - - - - - - - - - - - D6F-CABLE2 Note: 1. Can be calibrated for different gas types. Consult your Omron representative. 2. Dry gas must not contain large particles, eg dust, oil, mist. 3. Cable Assembly D6F-CABLE2, used with D6F-P0010A2 and D6F-P0010AM2, is sold separately. Specifications Characteristics Models D6F-P0001A1 D6F-P0010A1 D6F-P0010A2 D6F-P0010AM2 Flow Range (See note 1.) 0 to 0.1 L/min. 0 to 1 L/min. Calibration Gas (See note 2.) Air Flow Port Type barbed fitting maximum outside dia. 4.9 mm manifold mount Electrical Connection Lead terminal Connector (3 wire) Power Supply 4.75 to 9.45 VDC Current Consumption Max. 15 mA (no load, Vcc = 5 VDC) Operating Output Voltage 0.5 to 2.5 VDC Output Voltage Limits (Min and Max.) 0 VDC min. and 3.1 VDC max. (Lead resistance 10 k) Accuracy and Temperature Characteristics 5% F.S. max. of detected characteristics at 25 C, within -10 to +60 C (typical test results within 2% F.S.) Repeatability (Reference (typical)) 1.0% F.S. 0.4% F.S. Case Material PBT Degree of Protection IP40 Withstand Pressure 50 kPa (7 psi) Pressure Drop (Reference (typical)) 0.19 kPa 0.48 kPa Operating Temperature -10 to +60C (1 LPM versions) and -33 to +75C (0.1 LPM version) with no icing or condensation (Storage: -40 to +80C with no icing or condensation) Operating Humidity 35 to 85% RH with no icing or condensation (Storage: 35 to 85% RH with no icing or condensation) Insulation Resistance 20 M (500 VDC between lead terminal and the case) Dielectric Strength 500 VAC, 50/60 Hz for 1 minute. (Leakage current typ. Max. 1mA) between lead terminals and case. Weight 8.5 g 8.0 g Response Time (Reference (typical)) 150 msec Note: 1. Volumetric flow rate at 0C, 101.3 kPa. 2. Dry gas. (must not contain large particles, dust, oil, mist) MEMS Mass Flow Sensor D6F-P 7 Absolute Maximum Rating Item Symbol Rating Unit Power supply voltage Vcc 10 VDC Output voltage Vout 4.0 VDC Output Voltage Characteristics D6F-P0001A D6F-P0010A 3.0 3.0 2.5 2.5 2.0 2.0 1.5 1.5 1.0 1.0 0.5 0.5 0.0 0.0 0 0.02 0.04 0.06 0.08 0.10 0 0.25 0.5 0.75 1 Flow Rate (L/min) Flow Rate (L/min) D6F-P0001A Flow Rate (LPM) 0.00 0.02 0.04 0.06 0.08 0.10 Output Voltage (VDC) 0.50 0.10 0.90 0.10 1.30 0.10 1.70 0.10 2.10 0.10 2.50 0.10 D6F-P0010A Flow Rate (LPM) 0.00 0.25 0.50 0.75 1.00 Output Voltage (VDC) 0.50 0.10 1.60 0.10 2.10 0.10 2.31 0.10 2.50 0.10 Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0C, 1 atmosphere. 2. 0 to 0.5 VDC output indicates a negative flow direction. 3. Measurement condition: Power supply voltage of 5.0 0.1VDC, ambient temperature of 25 5 C and ambient humidity of 35% to 75% RH. Repeatability. (Typical test results) (5 Samples, D6F-P0010A , repeated 10 times each) 1.0 0.8 0.6 0.4 0.2 0.0 -0.2 -0.4 -0.6 -0.8 -1.0 0.0 0.3 0.5 0.8 1.0 Flow Rate(lpm) 8 MEMS Mass Flow Sensor D6F-P Output Voltage (V) Repeatability (%F.S.) Output Voltage (V)