MEMS Airflow Sensor D6F-10A, -20A, -50A Compact, intelligent sensor featuring MEMS technology for precision mass airflow measurement Precision mass airflow up to 50 LPM Stable output across full scale Manifold mounting feature with NBR O ring option Compact size 78 (L) x 30 (W) x 30 (H) mm Low power consumption RoHS Compliant Ordering Information Description Case Applicable Gas Flow Range** Connection Type Model Mass Flow Sensor Thermoplastic resin Air* 0 10 LPM Right-angle manifold D6F-10A5-000 / Aluminum alloy mount connection 0 20 LPM D6F-20A5-000 0 50 LPM D6F-50A5-000 0 10 LPM Straight RC1/4 (1/4 BSPT) D6F-10A6-000 threaded pipe* 0 20 LPM D6F-20A6-000 0 50 LPM D6F-50A6-000 Cable Connector Assembly - - - - - - - - - - - - D6F-CABLE1 Note: Cable Assembly is sold separately. * Contact Omron for other gases or thread types. **Mass flow converted to volumetric flow (standard liters per minute) at 0C and 1 atm. Application Examples Industrial processes Mass flow controllers Medical Respirators and Ventilators Scientific / test equipment MiG and TiG welding systems Fuel cell controls Anesthesia Delivery Rating Absolute maximum rating Item Symbol Ratings Unit Power supply V 26.4 VDC CC Output voltage V 6VDC OUT Electrical Performance Item Term Condition MIN MAX Unit Power supply V 10.8 26.4 VDC CC Operating temperature T No condensation or icing -10 60 C OPR V = 12 to 24VDC I = 0.5mA 5 5.7 VDC Output voltage (max.) V OH CC OH Output voltage (min.) V V = 12 to 24VDC I = -0.5mA 0 1 VDC OL CC OL MEMS Airflow Sensor D6F-10A, -20A, -50A 23Characteristics Model D6F-10A -000 D6F-20A -000 D6F-50A -000 Flow rate 0 C and 101.3 kPa 0-10 L/min 0-20 L/min 0-50 L/min Joint type* Manifold mount with O Ring (A5 type) or Rc 1/4 (1/4 BSPT threaded)(A6 type)** Case material Thermoplastic resin Applicable Gas** Air Electrical Connection Connector (3 wire) Withstand Pressure (max.) 500 kPa (about 72.5 psi) Accuracy 3% F.S. max, 25 C Operating Temperature -10 to +60 C (with no icing or condensation) Storage Temperature -30 to +80 C (with no icing or condensation) Operating Humidity 85%RH max. (with no icing or condensation) Output Signal 1 to 5 VDC, Analog Output (non-linear output) Current Consumption 15 mA max. (No-Load with V = 12 to 24 VDC, V = 0V and 25 C) CC SS Insulation Resistance 20M min. at 500 VDC, between lead terminal and case Dielectric Strength 500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and the base Response Time (reference) 150 mS, typical * Contact Omron for other thread types (A6) ** Contact Omron for other gases. Operating Characteristics D6F-10A D6F-20A D6F-50A 6.0 6.0 6.0 5.0 5.0 5.0 4.0 4.0 4.0 3.0 3.0 3.0 2.0 2.0 2.0 1.0 1.0 1.0 0.0 0.0 0.0 0.0 4.0 8.0 12.0 16.0 20.0 0.0 10.0 20.0 30.0 40.0 50.0 0.0 2.0 4.0 6.0 8.0 10.0 Flow rate(L/min) Flow rate(L/min) Flow rate(L/min) D6F-10A Flow Rate L/min (normal)0 246 810 Output Voltage (VDC) 1.00 0.12 1.75 0.12 2.60 0.12 3.45 0.12 4.25 0.12 5.00 0.12 D6F-20A Flow Rate L/min (normal)0 4812 16 20 Output Voltage (VDC) 1.00 0.12 1.93 0.12 2.87 0.12 3.70 0.12 4.41 0.12 5.00 0.12 D6F-50A Flow Rate L/min (normal)0 102030 4050 Output Voltage (VDC) 1.00 0.12 2.45 0.12 3.51 0.12 4.20 0.12 4.66 0.12 5.00 0.12 24 MEMS Airflow Sensor D6F-10A, -20A, -50A Output voltage(V) Output voltage(V) Output voltage(V)