D6F-N2/-L2 MEMS Flow Sensor A Compact, High-accuracy Sensor That Measures Low Flow Rates. High accuracy of 3% FS. Flow rates can be measured without being affected by temperature or pressure. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-01N2-000 D6F-05N2-000 6.0 6.0 Applicable fluid Flow rate range Model 5.0 5.0 0 to 1 L/min D6F-01N2-000 4.0 4.0 Natural gas (13A) 0 to 2 L/min D6F-02N2-000 3.0 3.0 2.0 2.0 0 to 5 L/min D6F-05N2-000 1.0 1.0 LP gas 0 to 2 L/min D6F-02L2-000 0.0 0.0 0.0 0.2 0.4 0.6 0.8 1.0 0.0 1.0 2.0 3.0 4.0 5.0 Flow rate (L/min) Flow rate (L/min) Accessory (included) D6F-02N2-000 D6F-02L2-000 Type Model 6.0 6.0 Cable D6F-CABLE1 5.0 5.0 4.0 4.0 3.0 3.0 Connections 2.0 2.0 1.0 1.0 D6F-01N2-000 0.0 0.0 0.0 0.4 0.8 1.2 1.6 2.0 0.0 0.4 0.8 1.2 1.6 2.0 D6F-02N2-000 Flow rate (L/min) Flow rate (L/min) D6F-05N2-000 D6F-01N2-000 D6F-02L2-000 Flow rate 0 0.2 0.4 0.6 0.8 1.0 Pin No. 1: Vcc L/min (normal) 2: Vout Output voltage 1.00 1.90 2.81 3.64 4.37 5.00 3: GND V 0.12 0.12 0.12 0.12 0.12 0.12 Connector 53398 (Made by Molex Japan) Use the following connectors for connections to the D6F: D6F-02N2-000 Housing 51021 (Made by Molex Japan) Flow rate Terminals 50079 (Made by Molex Japan) 0 0.4 0.8 1.2 1.6 2.0 Wires AWG28 to AWG26 L/min (normal) Output voltage 1.00 2.20 3.20 3.98 4.55 5.00 V 0.12 0.12 0.12 0.12 0.12 0.12 D6F-05N2-000 2: Vout Flow rate 1: Vcc 3: GND 0 1.0 2.0 3.0 4.0 5.0 L/min (normal) Output voltage 1.00 2.91 3.92 4.47 4.79 5.00 V 0.12 0.12 0.12 0.12 0.12 0.12 D6F-02L2-000 Enlarged View Flow rate 0 0.4 0.8 1.2 1.6 2.0 L/min (normal) Output voltage 1.00 3.02 3.95 4.47 4.79 5.00 V 0.30 0.08 0.08 0.08 0.08 0.12 Measurement conditions: Power supply voltage of 120.1 VDC, ambient tem- perature of 255C, and ambient humidity of 35% to 75%. 10 Output voltage (V) Output voltage (V) Output voltage (V) Output voltage (V)D6F-N2/-L2 MEMS Flow Sensor Characteristics/Performance Model D6F-01N2-000 D6F-02N2-000 D6F-05N2-000 D6F-02L2-000 Flow Range (See note 1.) 0 to 1 L/min 0 to 2 L/min. 0 to 5 L/min 0 to 2 L/min. Calibration Gas (See note 2.) Natural gas (13A) Propane gas Flow Port Type Rc 1/4 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) 2% to 7.5% F.S. (25C Accuracy 3% FS (25C characteristic) characteristic) Repeatability (See note 3.) 0.2% FS 0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case Aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.017 kPa 0.033 kPa 0.10 kPa 0.14 kPa Operating Temperature (See note 4.) 10 to 60C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) 40 to 80C Storage Humidity (See note 4.) 35% to 85% 4% FS for 25C Temperature Characteristics 3% FS for 25C characteristic at 10 to 60C characteristic at 10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 35.3 g Note: 1. Volumetric flow rate at 0C, 101.3 kPa. Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) Note: 4. With no condensation or icing. Dimensions (Unit: mm) D6F-01N2-000 D6F-02N2-000 Two, M3 holes with a depth of at least 5 mm 16.2 D6F-05N2-000 Mounting Hole Dimensions D6F-02L2-000 16.20.05 Two, 3.5 dia. 0.5 37 62 0.05 (3.7) 37 (6) 21.60.5 10 10 Cable (included): D6F-CABLE1 3-17 20035 Brown wire 0.5 10015 22.1 1. Vcc Black wire 8.85 2. Vout 3. GND Blue wire Two, tapped threads 0.35 for Rc 1/4 pipe 11