D6F-A3 MEMS Flow Sensor High-accuracy Sensing with a Thin, Compact Body. A thin, lightweight flow sensor. Unique flow path structure provides high precision and fast response. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-03A3-000 6.0 Applicable fluid Flow rate range Model 5.0 Air 0 to 3 L/min D6F-03A3-000 4.0 3.0 2.0 Accessory (Sold separately) 1.0 Type Model 0.0 0.0 0.6 1.2 1.8 2.4 3.0 D6F-CABLE2 Flow rate (L/min) Cable D6F-CABLE2-L D6F-03A3-000 Note: Refer to Accessories for the D6F Series on page 39. Flow rate 0 0.6 1.2 1.8 2.4 3.0 L/min (normal) Output voltage 1.00 2.83 3.77 4.34 4.72 5.00 Connections V 0.2 0.2 0.2 0.2 0.2 0.2 D6F-03A3-000 Measurement conditions: Power supply voltage of 12 0.1 VDC, ambient temperature of 25 5C, and ambient humidity of 35% to 75%. 2: Vout 1: GND 3: Vcc Enlarged View Pin No. 1: GND 2: Vout 3: Vcc Connector SM03B-SRSS-TB (Made by J.S.T. Mfg. Co.) Use the following connectors made by J.S.T. Mfg. Co. for connections to the Sensor: Pressure-welded Connector Socket: 03SR-3S Wires: AWG30 Or Crimp Connector Contacts: SSH-003T-P0.2 Housing: SHR-03V-S or SHR-03V-S-B Wires: AWG32 to AWG28 12 Output voltage (V)D6F-A3 MEMS Flow Sensor Characteristics/Performance Model D6F-03A3-000 Flow Range (See note 1.) 0 to 3 L/min Calibration Gas (See note 2.) Air Flow Port Type M5 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k ) Accuracy 5% FS (25C characteristic) Repeatability (See note 3.) 0.7% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k ) Output Voltage (Min.) 0 VDC (Load resistance: 10 k ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.45 kPa Operating Temperature (See note 4.) 0 to 50C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) 10 to 60C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 5% FS for 25C characteristic at an ambient temperature of 0 to 50C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 5.3 g Note: 1. Volumetric flow rate at 0C, 101.3 kPa. Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) Note: 4. With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-03A3-000 Mounting Hole Dimensions D6F -03A3-000 OUT side IN side MADE IN JAPAN Two, 0.05 18 8 M3 screw holes M5 threads (Effective thread depth: 3.1) +0.15 14 3.1 0.05 16.8 6.8 +0.15 3.4-dia. 0.15 3.1 dia. through hole 18 0.05 36.6 13
