MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring
MEMS technology for precision mass
airflow measurement
Precision mass airflow up to 50 LPM
Stable output across full scale
Manifold mounting feature with NBR O ring option
Compact size 78 (L) x 30 (W) x 30 (H) mm
Low power consumption
RoHS Compliant
Ordering Information
Description Case Applicable Gas Flow Range** Connection Type Model
Mass Flow Sensor Thermoplastic resin Air* 0 10 LPM Right-angle manifold D6F-10A5-000
/ Aluminum alloy mount connection
0 20 LPM D6F-20A5-000
0 50 LPM D6F-50A5-000
0 10 LPM Straight RC1/4 (1/4 BSPT) D6F-10A6-000
threaded pipe*
0 20 LPM D6F-20A6-000
0 50 LPM D6F-50A6-000
Cable Connector Assembly - - - - - - - - - - - - D6F-CABLE1
Note: Cable Assembly is sold separately.
* Contact Omron for other gases or thread types.
**Mass flow converted to volumetric flow (standard liters per minute) at 0C and 1 atm.
Application Examples
Industrial processes Mass flow controllers
Medical Respirators and Ventilators Scientific / test equipment
MiG and TiG welding systems Fuel cell controls
Anesthesia Delivery
Rating
Absolute maximum rating
Item Symbol Ratings Unit
Power supply V 26.4 VDC
CC
Output voltage V 6VDC
OUT
Electrical Performance
Item Term Condition MIN MAX Unit
Power supply V 10.8 26.4 VDC
CC
Operating temperature T No condensation or icing -10 60 C
OPR
V = 12 to 24VDC I = 0.5mA 5 5.7 VDC
Output voltage (max.) V
OH CC OH
Output voltage (min.) V V = 12 to 24VDC I = -0.5mA 0 1 VDC
OL CC OL
MEMS Airflow Sensor D6F-10A, -20A, -50A 23Characteristics
Model D6F-10A@-000 D6F-20A@-000 D6F-50A@-000
Flow rate @ 0 C and 101.3 kPa 0-10 L/min 0-20 L/min 0-50 L/min
Joint type* Manifold mount with O Ring (A5 type) or Rc 1/4 (1/4 BSPT threaded)(A6 type)**
Case material Thermoplastic resin
Applicable Gas** Air
Electrical Connection Connector (3 wire)
Withstand Pressure (max.) 500 kPa (about 72.5 psi)
Accuracy 3% F.S. max, 25 C
Operating Temperature -10 to +60 C (with no icing or condensation)
Storage Temperature -30 to +80 C (with no icing or condensation)
Operating Humidity 85%RH max. (with no icing or condensation)
Output Signal 1 to 5 VDC, Analog Output (non-linear output)
Current Consumption 15 mA max. (No-Load with V = 12 to 24 VDC, V = 0V and 25 C)
CC SS
Insulation Resistance 20M min. at 500 VDC, between lead terminal and case
Dielectric Strength 500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and the base
Response Time (reference) 150 mS, typical
* Contact Omron for other thread types (A6)
** Contact Omron for other gases.
Operating Characteristics
D6F-10A D6F-20A D6F-50A
6.0
6.0 6.0
5.0 5.0
5.0
4.0
4.0 4.0
3.0
3.0 3.0
2.0
2.0 2.0
1.0
1.0 1.0
0.0
0.0 0.0
0.0 4.0 8.0 12.0 16.0 20.0 0.0 10.0 20.0 30.0 40.0 50.0
0.0 2.0 4.0 6.0 8.0 10.0
Flow rate(L/min) Flow rate(L/min) Flow rate(L/min)
D6F-10A
Flow Rate L/min (normal)0 246 810
Output Voltage (VDC) 1.00 0.12 1.75 0.12 2.60 0.12 3.45 0.12 4.25 0.12 5.00 0.12
D6F-20A
Flow Rate L/min (normal)0 4812 16 20
Output Voltage (VDC) 1.00 0.12 1.93 0.12 2.87 0.12 3.70 0.12 4.41 0.12 5.00 0.12
D6F-50A
Flow Rate L/min (normal)0 102030 4050
Output Voltage (VDC) 1.00 0.12 2.45 0.12 3.51 0.12 4.20 0.12 4.66 0.12 5.00 0.12
24 MEMS Airflow Sensor D6F-10A, -20A, -50A
Output voltage(V)
Output voltage(V)
Output voltage(V)