Ultra Low Noise, Low offset Drift 1 g Dual Axis Accelerometer with Digital Outputs MXD2020E/F Sck Internal Temperature T FEATURES OUT Oscillator Sensor (optional) Resolution better than 1 mg at 1 Hz Voltage Dual axis accelerometer fabricated on a monolithic CMOS IC V REF Reference CLK RoHS compliant On-chip mixed mode signal processing Continous Heater Self Test 50,000 g shock survival rating Control 17 Hz bandwidth 3.00V to 5.25V single supply operation Low Pass X axis D OUTX Filter Small (5mm x 5mm x 2mm) surface mount package Continuous self-test Factory Adjust Independent axis programmability (special order) Offset & Gain Low Pass APPLICATIONS Y axis D OUTY Filter Automotive Vehicle Security/Active Suspension/ABS 2-AXIS SENSOR Headlight Angle Control/Tilt Sensing Security Gas Line/Elevator/Fatigue Sensing V Gnd V DD DA Office Equipment Computer Peripherals/PDAs/Cell Phones Gaming Joystick/RF Interface/Menu Selection/Tilt Sensing MXD2020E/F FUNCTIONAL BLOCK DIAGRAM Projectors - Leveling and Keystoning White Goods Spin/Vibration Control GENERAL DESCRIPTION The MXD2020E/F is an ultra low noise and low cost, dual The typical noise floor is 0.2mg / Hz allowing signals axis accelerometer built on a standard, submicron CMOS below 1mg to be resolved at 1 Hz bandwidth. The process. The MXD2020E/F measures acceleration with a MXD2020E/F is available in a LCC surface mount package full-scale range of 1 g and a sensitivity of 20%/g 5V at (5mm x 5mm x 2mm height). It is hermetically sealed and 25C. It can measure both dynamic acceleration (e.g., operational over a -40C to +105C temperature range. vibration) and static acceleration (e.g., gravity). The MXD2020E/F design is based on heat convection and Due to the standard CMOS structure of the MXD2020E/F, requires no solid proof mass. This eliminates stiction and additional circuitry can easily be incorporated into custom particle problems associated with competitive devices and versions for high volume applications. Contact the factory provides shock survival up to 50,000 g, leading to for more information. significantly lower failure rates and lower losses due to handling during assembly. The MXD2020E/F provides two digital outputs. The outputs are digital signals with duty cycles (ratio of pulse width to period) that are proportional to acceleration. The duty cycles outputs can be directly interfaced to a micro- processor. MEMSIC, Inc. Information furnished by MEMSIC is believed to be accurate and reliable. 800 Turnpike St., Suite 202, North Andover, MA01845, USA However, no responsibility is assumed by MEMSIC for its use, nor for any Tel: +1 978 738 0900 Fax: + 978 738 0196 infringements of patents or other rights of third parties, which may result from its use. No license is granted by implication or otherwise under any patent or www.memsic.com patent rights of MEMSIC MEMSIC MXD2020E/F Rev H Page 1 of 8 2/26/2007 MXD2020E/F SPECIFICATIONS (Measurements 25C, Acceleration = 0g unless otherwise noted, V , V = DD DA 5.0V unless otherwise specified) MXD2020E/F Parameter Conditions Min Typ Max Units SENSOR INPUT Each Axis 1 Measurement Range g 1.0 Nonlinearity Best fit straight line 0.5 1.0 % of FS 2 Alignment Error 1.0 degrees 3 Transverse Sensitivity 2.0 % SENSITIVITY Each Axis D and D 5.0V supply 19.0 20.0 21.0 % Duty OUTX OUTY Cycle/g 4 Change over Temperature (uncompensated) +120 % from 25C, at 40C -55 % from 25C, at +105C 4 Change over Temperature (compensated) <3.0 % from 25C, 40C to +105C ZERO g BIAS LEVEL Each Axis 5 0 g Offset -0.1 0.00 +0.1 g 5 0 g Duty Cycle 48 50 52 % Duty Cycle 0 g Offset over Temperature from 25C 0.4 mg/C based on 20%/g 0.008 % / C PWM output Frequency For MXD2020EL only 97 100 103 Hz MXD2020E 95 100 105 Hz MXD2020F 380 400 420 Hz NOISE PERFORMANCE mg/ Hz Noise Density, rms 0.2 0.4 FREQUENCY RESPONSE 3dB Bandwidth 15 17 19 Hz TEMPERATURE OUTPUT T Voltage 1.15 1.25 1.35 V out Sensitivity 4.6 5.0 5.4 mV/K VOLTAGE REFERENCE OUTPUT Voutput 3.0V-5.25V supply 2.4 2.5 2.65 V Ref Change over Temperature 0.1 mV/C Current Drive Capability Source 100 A SELF TEST Continuous Voltage at D , D under 5.0V Supply, output rails to OUTX OUTY Failure supply voltage 5.0 V Continuous Voltage at D , D under 3.0V Supply, output rails to OUTX OUTY Failure supply voltage 3.0 V D and DOUTPUTS OUTX OUTY Normal Output Range Output High 4.8 V Output Low 0.2 V Current Source or sink, 3.0V-5.25V supply 100 A Rise/Fall Time 3.0 to 5.0V Supply 90 100 110 nS Turn-on Time 5.0V Supply 160 mS 3.0V Supply 300 mS POWER SUPPLY Operating Voltage Range 3.0 5.25 V Supply Current 5.0V 2.7 3.3 4.1 mA Supply Current 3.0V 3.2 4.0 4.8 mA TEMPERATURE RANGE Operating Range -40 +105 C NOTES 5 The device operates over a 3.0V to 5.25V supply range. Please note that 1 Guaranteed by measurement of initial offset and sensitivity. sensitivity and zero g bias level will be slightly different at 3.0V operation. For 2 Alignment error is specified as the angle between the true and indicated devices to be operated at 3.0V in production they can be trimmed at the factory axis of sensitivity. specifically for this lower supply voltage operation, in which case the sensitivity and 3 Transverse sensitivity is the algebraic sum of the alignment and the inherent zero g bias level specifications on this page will be met. Please contact the factory sensitivity errors for specially trimmed devices for low supply voltage operation. 4 The sensitivity change over temperature for thermal accelerometers is based on 6 Output settled to within 17mg. variations in heat transfer that are governed by the laws of physics and it is highly consistent from device to device. Please refer to the section in this data sheet titled Compensation for the Change of Sensitivity over Temperature for more information. MEMSIC MXD2020E/F Rev H Page 2 of 8 2/26/2007