DATA SHEET Example Transfer Function (Sensor pn 140X-P15D-11): Vout = (250 * P) + Offset Error Example Transfer Function (Sensor pn 140X-P15D-11): This graph assumes offset = 0mV, error = 0mV, Vs = 5.0V, and TEMP = 25C Vout = (250 * P) + Offset Error LP Series Uncompensated This graph assumes offset = 0mV, error = 0mV, Vs = 5.0V, and TEMP = 25C 40 40 35 35 LP Series - Uncompensated is a surface mountable pressure sensor package with 30 an uncompensated output suitable for ultra-low pressure sensing applications. 30 25 COMPANY: Merit Sensor is a leader in piezoresistive 25 20 pressure sensing and partners with clients to create high performing solutions for a variety of applications and industries. 15 20 SENTIUM: Merit Sensor products incorporate a proprietary *Example: When using the 140X-P15D-11, 10 the typical output at 1 H2O (0.036psi) = 9.0mV Sentium technology developed to provide a best-in-class operating 15 temperature range (-40C to 85C) and superior stability. 5 *Example: When using the 140X-P15D-11, 10 the typical output at 1 H2O (0.036psi) = 9.0mV TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstone 0 0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.10 0.11 0.12 0.13 0.14 0.15 0.16 bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. All products are RoHS compliant. 5 Pressure (psig) CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices, 0 assembles, tests, sells and services die and packaged products from 0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.10 0.11 0.12 0.13 0.14 0.15 0.16 a state-of-the-art facility near Salt Lake City, Utah Pressure (psig) FEATURES 1400 Family Part Number Configurator Low Pressure 0.15 to 1 psi (10.3 to 68.9 mbar 1.03 to 6.89 KPa Range 4.2 to 27.7 inH O) 2 14XX-XXXX- XX Bridge Medium 5 psi to 30 psi (0.34 to 2.1 bar 34.5 to 207 KPa) 01 = Open Pressure 02 = Closed Pin Type Range 1 = J-lead Type Differential (and Absolute at 15psi and 30psi) Pressure Port P15 = .15psi Media Clean, Dry Air and Non-corrosive Gases 1 = Dual P30 = .30psi horizontal, facing 1P0 = 1.0psi Packaging Tape and Reel same side 005 = 5.0psi 015 = 15psi Customization Sensitivity, Resistance, Bridge, Constraint, etc. 030 = 30psi Reference D = Differential BENEFITS Merit Sensor owns and operates a MEMS wafer fab, which enables the production of A = Absolute (15 and 30 psi only) Performance Enjoy best-in-class performance due to Merits customized piezoresistive pressure sensors for medical, industrial, and automotive applications. proprietary Sentium technology We help you get to market quickly with creative and flexible solutions and provide prompt, Cost Save money over time with high-performing die personal, and professional customer support. Security Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI) Speed Get to market quickly with creative and flexible solutions Service Experience prompt, personal and professional support Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sensors merit.com www.MeritSensor.com Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sensors merit.com www.MeritSensor.com 1600 W. Merit Parkway South Jordan, Utah 84095 USA 1600 W. Merit Parkway South Jordan, Utah 84095 USA 1400seriesDS.007 Output (milliVolts) Output (milliVolts)LP Series Uncompensated CROSS SECTION FOR DIFFERENTIAL CROSS SECTION FOR ABSOLUTE MEMS sensing element (differential pressure) SPECIFICATIONS Soft die attach material Cover/mechanical protection Parameter Minimum Typical Maximum Units Notes Electrical Excitation (In) 5 15 V Maximum: 3mA Impedance 4000 5000 6000 Media inlet ports Operating Temperature -40 85 C Storage Temperature -55 100 C Performance (0.15psi to 1.00psi) Offset -10 0 10 mV/V Zero Pressure gage only 25C Non-linearity -0.25 0 0.25 % FSO Best Fit Straight Line 25C Electrical connections Pressure Hysteresis -0.1 0 0.1 % FSO 25C Temp Coeff Zero -20 0 20 V/V/C -25C to 75C Temp Coeff Resistance 2000 2500 3000 PPM/C -25C to 75C PACKAGING SENSOR BRIDGE Pin-out Temp Coeff Sensitivity -2500 -3000 -3500 PPM/C -25C to 75C (0.15psi) 16.0mm Temp Coeff Sensitivity -2000 -2500 -3000 PPM/C -25C to 75C (0.2psi 1psi) Long-Term Stability -0.25 0 0.25 % FSO 125C V V +IN +IN 5 1 Proof Pressure 5X Full scale pressure OPEN 32.0mm Burst Pressure 10psi Performance (5psi to 30psi) V V 4 2 -OUT +OUT Offset -10 0 10 mV/V Zero pressure gage only 25C Non-linearity -0.25 0 0.25 % FSO Best Fit Straight Line 25C 2.0mm Pressure Hysteresis -0.1 0 0.1 % FSO 25C 4.0mm 3 8 Temp Coeff Zero -20 0 20 V/V/C -40C to 85C V V -IN -IN Temp Coeff Resistance 2500 3100 3500 PPM/C -40C to 85C Temp Coeff Sensitivity -1500 -2000 -2500 PPM/C -40C to 85C DIMENSIONS (millimeters) Long-Term Stability -0.1 0 0.1 % FSO Device 2.5 2.5 Pinout Open Close 3.7 Burst Pressure 10X Full scale pressure 2.5 2.5 3.7 2.5 2.5 P1 +IN +IN 8 7 6 5 Full Scale Output ( 5 volts) 8 7 6 5 P2 +O +O -IN +IN -IN +IN P3 -IN -IN 0.15psi (4 inH O 1.03 KPa) 30 37.5 60 mV 8 7 6 5 2 8 7 6 5 2.1 8.5 2.1 8.5P4 -O -O 13.4 12.1 0.30psi (8.3 inH O 2.1 KPa) 36 45 54 mV 2 13.4 12.1 P5 +IN N/C 11.4 11.4 1.00psi (27 inH O 6.9 KPa) 40 50 60 mV P6 N/C N/C 2 P7 N/C N/C 5 psi (0.34 bar 34.5 KPa) 107 133 160 mV 1 23 4 2.5 2.5 1 23 4 2.5 2.5 P8 -IN N/C 2.5 2.5 +IN 1.9 2.5 15 psi (1 bar 103 KPa) 120 150 180 mV +O -IN -O 2.5 +IN 1.9 +O -IN -O 10.3 1 23 4 10.3 1 23 4 30 psi (2.1 bar 207 KPa) 128 160 192 mV 2.5 1.3 Media Compatibility 1.3 SMT Landing Pad Layout 3.7 2.5 2.5 SMT Landing Pad Layout For Use with non-corrosive dry gases 8 7 6 5 -IN +IN Solder temperature: max 250 C, 5 seconds max 8 7 6 5 2.1 8.5 13.4 12.1 11.4 2.5 2.5 1 23 4 2.5 2.5 +IN 1.9 +O -IN -O 10.3 1 23 4 1.3 SMT Landing Pad Layout