SDP600 Series (SDP6xx/5xx) Low-cost Digital Differential Pressure Sensor Accuracy better than 0.2% FS near zero 2 Digital output (I C) Excellent repeatability, even below 10 Pa Calibrated and temperature compensated Excellent long-term stability Flow measurement in bypass configuration Product Summary The SDP600 sensor family is Sensirions series of digital The outstanding performance of these sensors is based differential pressure sensors designed for high-volume on Sensirions patented CMOSens sensor technology, applications. They measure the pressure of air and non- which combines the sensor element, signal processing aggressive gases with superb accuracy and no offset drift. and digital calibration on a tiny microchip. The differential The sensors cover a pressure range of up to 500 Pa pressure is measured by a thermal sensor element using (2 inch H O / 5 mbar) and deliver outstanding accuracy flow-through technology. Compared with membrane- 2 even at the bottom end of the measuring range. based sensors, the SDP600 features an extended dynamic range, better long-term stability, and improved The SDP600 series operates from a 3.3V supply voltage repeatability, especially near zero. and features a digital 2-wire interface, which makes it easy to connect directly to a microprocessor. The signal is The well-proven CMOS technology is perfectly suited for internally linearized and temperature compensated. high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications. Applications Sensor chip Medical The SDP600 series features a fourth-generation silicon sensor chip called SF04. In addition to a thermal mass HVAC flow sensor element, the chip contains an amplifier, A/D Automotive converter, EEPROM memory, digital signal processing Process automation circuitry, and interface. The highly sensitive chip requires Burner control only a minuscule amount of gas flow through the sensor. OEM options A variety of custom options can be implemented for high- volume OEM applications. Ask us for more information. www.sensirion.com Version 1.9 July 2015 1/10 1. Sensor Performance 1 1.1 Physical specifications Parameter SDP600-500Pa SDP600-125Pa SDP600-25Pa SDP601 SDP500 SDP501 SDP610-500Pa SDP610-125Pa SDP610-25Pa SDP611 SDP510 SDP511 Short Description Standard Low DP Lowest DP Mass Flow Low cost Low cost Mass Flow 500 Pa 125 Pa 25 Pa 500 to + 500 0 Pa 2 Calibrated range to + 500 Pa to + 125 Pa to + 25 Pa Pa to +500 Pa ( 2.0 in. H2O) ( 0.5 in. H2O) ( 0.1 in. H2O) ( 2.0 in. H2O) (0 to 2.0 in. H2O) Temperature- 3 3 yes yes yes mass flow yes mass flow compensation 4 Resolution 12 bits preset (adjustable from 9 to 16 bit) 5,6 Zero point accuracy 0.2 Pa 0.1 Pa 0.2 Pa 5,6 Span accuracy 3% of reading 4.5% of reading Zero point 0.1 Pa 0.05 Pa 0.03 Pa 0.1 Pa 5,6 repeatability 5,6 Span repeatability 0.5% of reading Offset shift due to None temperature variation (less than resolution) Span shift due to < 0.5% of reading per 10C temperature variation Offset stability < 0.1 Pa/year 4 Response time 4.6 ms typical at 12-bit resolution Warm-up time for first Typ. 50 ms reliable measurement (first measurement typically after 16 ms) 1 Unless otherwise noted, all sensor specifications are valid at 25C with Vdd = 3.3 V and absolute pressure = 966 mbar. 2 The SDP50x/SDP51x sensors can detect negative differential pressures in the range of -500 to 0Pa. A negative differential pressure is represented by a negative value. The accuracy of the negative differential pressure is not specified and might have significant inter-sensor variation. 3 Please see chapter 5.3 for details. 4 See Application Note for response times with other resolutions, e.g. 1.3 ms with 10 bits. 5 With 12-bit resolution includes repeatability and hysteresis. 6 Total accuracy/repeatability is a sum of zero-point and span accuracy/repeatability. www.sensirion.com Version 1.9 July 2015 2/10