SDP600 Series (SDP6xx/5xx) Low-cost Digital Differential Pressure Sensor Accuracy better than 0.2% FS near zero 2 Digital output (I C) Excellent repeatability, even below 10 Pa Calibrated and temperature compensated Excellent long-term stability Flow measurement in bypass configuration Product Summary The SDP600 sensor family is Sensirions series of digital The outstanding performance of these sensors is based differential pressure sensors designed for high-volume on Sensirions patented CMOSens sensor technology, applications. They measure the pressure of air and non- which combines the sensor element, signal processing aggressive gases with superb accuracy and no offset drift. and digital calibration on a tiny microchip. The differential The sensors cover a pressure range of up to 500 Pa pressure is measured by a thermal sensor element using (2 inch H O / 5 mbar) and deliver outstanding accuracy flow-through technology. Compared with membrane- 2 even at the bottom end of the measuring range. based sensors, the SDP600 features an extended dynamic range, better long-term stability, and improved The SDP600 series operates from a 3.3 Vdc supply repeatability, especially near zero. voltage and features a digital 2-wire interface, which makes it easy to connect directly to a microprocessor. The The well-proven CMOS technology is perfectly suited for signal is internally linearized and temperature high-quality mass production and is the ideal choice for compensated. demanding and cost-sensitive OEM applications. Applications Connection diagram Medical Vdd HVAC VDD 3.3V C SDP600 Automotive SDA Series Process automation (master) SCL (slave) Burner control GND New versions Low pressure versions SDP600/610-125Pa and SDP600 series with bidirectional digital communication 2 SDP600/610-25Pa are suited to measure very low and (I C bus) ultra low differential pressure. Low power versions (SDP606/SDP616) are developed Sensor chip especially for low power battery operation. Special calibration to measure a massflow in bypass The SDP600 series features a fourth-generation silicon configuration (SDP601/SDP611). sensor chip called SF04. In addition to a thermal mass flow sensor element, the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing OEM options circuitry, and interface. The highly sensitive chip requires only a minuscule amount of gas flow through the sensor. A variety of custom options can be implemented for high- volume OEM applications. Ask us for more information. www.sensirion.com Version 1.7 September 2012 1/10 1. Sensor Performance 1 1.1 Physical specifications Parameter SDP500 SDP600-500Pa SDP600-125Pa SDP600-25Pa SDP601 SDP606 SDP510 SDP610-500Pa SDP610-125Pa SDP610-25Pa SDP611 SDP616 Short Description Low cost Standard Low DP Lowest DP Mass Flow Low 2 Power 0 Pa 500 Pa 125 Pa 25 Pa 500 to + 500 Pa 3 Calibrated range to +500 Pa to + 500 Pa to + 125 Pa to + 25 Pa ( 2.0 in. H2O) (0 to 2.0 in. H2O) ( 2.0 in. H2O) ( 0.5 in. H2O) ( 0.1 in. H2O) 125Pa 25 Pa 500 to + 500 Pa Measurement range 500 to + 500 Pa to + 125 Pa to + 25 Pa ( 2.0 in. H O) 2 ( 2.0 in. H2O) ( 0.5 in. H2O) ( 0.1 in. H2O) Temperature- 4 yes yes yes yes mass flow yes compensation 5 Resolution 12 bits preset (adjustable from 9 to 16 bit) 16 bit 6,7 Zero point accuracy 0.2 Pa 0.1 Pa 0.2 Pa 6,7 Span accuracy 4.5% of reading 3% of reading Zero point 0.1 Pa 0.05 Pa 0.03 Pa 0.1 Pa 6,7 repeatability 6,7 Span repeatability 0.5% of reading Offset shift due to None temperature variation (less than resolution) Span shift due to < 0.5% of reading per 10C temperature variation Offset stability < 0.1 Pa/year 70 ms 5 Response time 4.6 ms typical at 12-bit resolution typical Warm-up time for first N/A Typ. 50 ms reliable measurement (first measurement typically after 16 ms) 1 Unless otherwise noted, all sensor specifications are valid at 25C with Vdd = 3.3 Vdc and absolute pressure = 966 mbar. 2 Low Power version are specified at 25C with Vdd = 3.0 Vdc and absolute pressure = 966 mbar. 3 The SDP500/SDP510 sensors do measure in the full range from -500 to +500 Pa. But in contrast to the SDP600/SDP610 we do not guarantee the specified accuracy for the negative measurement range for SDP500/SDP510. 4 Please see chapter 5.3 for details. 5 See Aplication Note for response times with other resolutions, e.g. 1.3 ms with 10 bits. 6 With 12-bit resolution includes repeatability and hysteresis. 7 Total accuracy/repeatability is a sum of zero-point and span accuracy/repeatability. www.sensirion.com Version 1.7 September 2012 2/10