Datasheet SFM3300-D Datasheet SFM3300-AW Digital Flow Meter for medical applications Flow range: 250 slm, bidirectional Small dead space < 10ml Single use (-D) version Re-use (-AW) version Very fast update time (0.5ms) Product Summary The SFM3300 series is Sensirions digital flow meter series The SFM3300 series has been designed with the use by designed for medical applications. It measures the flow rate medical professionals in mind. It features medical cones of air, oxygen and other non-aggressive gases with for pneumatic connection to standard breathing circuits and superb accuracy. The special design of the flow channel a mechanical interface for easy and reliable electrical results in a very small dead space. reconnection. The sensor element, signal processing and digital calibration are on a single microchip assuring very The SFM3300-D is the disposable single-use Version. The fast signal processing time, best-in-class accuracy and re-use version SFM3300-AW withstands washing and superior robustness to rough handling and adverse autoclaving procedures. It is in development stage with conditions. specifications identical to SFM3300-D. Both versions are extremely well suited for proximal flow measurements in The well-proven and patented CMOSens sensor medical ventilation and other respiratory applications. technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost- sensitive OEM applications. Sensor chip Applications The SFM3300 series flow meter features a fifth-generation Proximal Flow measurement silicon sensor chip. In addition to a thermal mass flow Expiratory flow measurement sensor element, the chip contains an amplifier, A/D For Ventilation & Anesthesia converter, EEPROM memory, digital signal processing Respiratory measurements circuitry, and interface. Due to seamless integration of Metabolic Measurements signal acquisition and processing on the single silicon die significant performance and cost benefits are achieved. OEM options A variety of custom options can be implemented for high- volume OEM applications (custom flow rates, calibration for other gases etc.). Contact us for more information. www.sensirion.com Version 1.2 January 2019 1/7 1 1.1 Physical specifications Parameter Condition Value Unit 2 Flow range -250 +250 slm 3 Typical Max 5 6 span <100 slm 3 5 % m.v. 4 5 6 Accuracy span >100 slm 7 10 % m.v. 5 2 offset 0.1 0.2 slm 8 6 span <25slm 2.0 2.5 % m.v 4,7 8 6 Noise Level span >25slm 3 5 % m.v 8 2 offset 0.1 0.2 slm 8 Accuracy shift for deviation from span 0.4 0.5 % m.v./10C 8 Reference temperature 25C offset 0.015 0.02 % m.v./10C 6 span 0.07 % m.v. Resolution (14bit) 2 offset 0.034 slm 8 60 slm 180 / 0.73 230 / 0.93 Pa / inH O 2 8 Pressure drop 100 slm 380 / 1.53 550 / 2.21 Pa / inH O 2 8 200 slm 1400 / 5.62 1900 / 7.63 Pa / inH O 2 1.2 Ambient conditions Parameter Condition Value Unit Calibrated Temperature Range Dry gas +10 +50 C Operating Temperature Range 10-95% rel. hum. (non cond.) +5 +50 C Recommended to use Extended Operating Range -20+5 C on-sensor heater Storage Temperature 10-95% rel. hum. (non cond.) -40 +70 C 15C - 35C 30 - 70 % rel. hum. Shelf Life for SFM3300-D 3 years storage in original packaging Operating Pressure Range absolute 0.54 1.1 bar Burst Overpressure gauge 0.3 bar 1.3 Media compatibility Parameter Value 9 Calibration Air Media Compatibility Air (non-condensing), N , O , other non- aggressive gases 2 2 Wetted Materials AW version Si, Si N , SiO , Gold, Epoxy, PPSU, silicone, stainless steel 3 4 x Wetted Materials D version Si, Si N , SiO , Gold, Epoxy, MABS, silicone 3 4 x 1 Reference conditions are temperature = 25C, absolute pressure = 966 mbar, horizontal flow and Vdd = 5V 2 slm: mass flow measured in liters per minute at standard conditions (T = 20 C, p = 1013.25 mbar) 3 forMa no sensor measured outside of this limits will be shipped and a CpK of 1.33 is targeted 4 For accuracy, noise level or resolution the total value is the sum of offset and span values 5 This value corresponds to a CpK of 0.67 (95% of sensors within the Typical limit) 6 %m.v. = % measured value = % of reading 7 Noise level defined as standard deviation of individual sensor readings, measured at full sampling rate 8 Average value 9 Contact Sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures. www.sensirion.com Version 1.2 January 2019 2/7