SFM4100 Series Low-cost Digital Mass Flow Meter for Gases Accuracy 3% m.v. 2 Digital output (I C) Multigas option available Calibrated and temperature compensated Excellent long-term stability Downmount or legris carstick fittings Product Summary The SFM4100 gas flow meter series is designed as a The outstanding performance of these sensors is based versatile OEM gas flow meter for demanding volume on Sensirions patented CMOSens sensor technology, applications. which combines the sensor element, signal processing and digital calibration on a single microchip. The mass The SFM4100 is designed to measure Air and non- flow is measured by a thermal method on the MEMS aggressive gases with excellent accuracy over a large sensor element. Compared to other thermal mass flow dynamic range. Mass flows ranges up to 20 slm are sensors (MEMS, hotwire or capillary type) the SFM4100 available. The SFM4100 series operates with supply features an extended dynamic range, higher long-term voltage 5-9 VDC and through its digital I2C interface it can stability, and improved repeatability. be easily embedded into a microprocessor environment. The sturdy design of the SFM4100 sensor allows for The well-proven CMOS technology is perfectly suited for operation pressures up to 10 barg. The flow signal is high-quality mass production and is the ideal choice for internally lineralized and temperature compensated. demanding and cost-sensitive OEM applications. Applications Sensor chip Medical (e.g. respiratory care, anesthesia) The SFM4100 series features a fourth-generation silicon Analytical Instruments sensor chip called SF04. In addition to a thermal mass Leak testing flow sensor element, the chip contains an amplifier, A/D Process automation converter, EEPROM memory, digital signal processing circuitry, and interface. The highly sensitive chip is Connection diagram particularly sensitive at lowest flows, giving the SFM4100 sensor its large dynamic range. VDD VDD=3.5-9V SFM4100 OEM options VLS=2.9-5.5V C A variety of custom options such as other analog output, SDA different gases, flow ranges, multigas calibration can be (master) implemented for high-volume OEM applications SCK GND (>1000pc/y). Ask us for more information. SFM4100 series with bidirectional digital communication 2 (I C bus) www.sensirion.com Version 1.3 January 2013 1/9 1.3 Materials 1. Sensor Performance Parameter SFM4100 Series Wetted materials 1.1 Physical specifications Si, Si N , SiOx, Gold, Viton , Epoxy, PA- 3 4 1 Parameter SFM4100 12, Stainless Steel, Nickel Plated Brass, Nylon, Nitrile, coated Aluminium, 2 Measurement range 0-20 slm Oxygenoex Calibration available Air, N2, O2, N2O, Ar or CO2 RoHS fully RoHS compliant 12 bits preset Resolution (for 916 bits see documentation) 3,4 Zero point accuracy 0.03 slm 2. Electrical Specifications 0.15% of full scale or 3% of reading, 3,4 Accuracy whichever is bigger 0.25% of reading or 5 sccm whichever 2.1 Power supply Span repeatability is bigger The SFM4100 series sensors require a supply voltage Offset shift due to 2 sccm / C (VDD) between 3.5V and 9 V. For the power supply of the temperature variation level shifter (VLS) a voltage between 2.9V and 5.5V is Span shift due to required. Please be aware that the VLS must be the same < 0.1% of reading per C temperature variation as the voltage of SCK. Offset stability < 0.01 slm/year Pressure drop at full 2.2 Electrical characteristics <25mbar flow Parameter SFM4100 4.6 ms 12-bit resolution Supply voltage 3.5 9.0 VDD Response time (See documentation for response times with 7 other resolutions, e.g. 1.3 ms with 10 bits) Level Shifter Supply 2.9 -5.5 VLS Warm-up time for first Max. 500ms Current drain < 12.5 mA typical in operation reliable measurement in general 50 ms 2 Interface Digital 2-wire interface (I C) 1 Unless otherwise noted, all sensor specifications are at 23C and Bus clock frequency SCL: 100 kHz typical absolute pressure = 4,8 bar. 2 Reference conditions for standard liters per minute slm: 20C, Air: 1 (0000001) 1013mbar sccm denotes standard cubic centimeters per minute O2: 2 (0000010) 2 3 Default I C address includes repeatability and hysteresis. CO : 3 (0000011) 2 4 per gas type The zero-point accuracy and span accuracy are independent N2O: 4 (0000100) uncertainties and add according to the principles of error propagation. Ar: 5 (0000101) Flow in sccm = value received 1 Flow output signal Flow in slm = value received / 1000 1.2 Ambient conditions 7 Same voltage as the communication level of the P is required. Parameter SFM4100 Series 5 Noncorrosive gases and gas Media compatibility mixtures 6 Limited media compatibility corrosive Gases 5 Calibrated temperature range 0 C to +50 C Operating temperature -20 C to +80 C 5 Storage temperature -40 C to +80 C Operating Pressure Range 0-6 bar gauge Position sensitivity Use flow horizontally, electronic connector up 5 Contact Sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures. 6 For a limited time period, depending on chemical. Not recommended. www.sensirion.com Version 1.3 January 2013 2/9