High Performance Bi-Directional Digital MEMS Gas Flow Sensor MFC2000 Series FEATURES Bi-directional flow (30 or 70SLM) High dynamic range 3% m.v. accuracy 0.8% m.v. repeatability Low power consumption Fast response time Single 2.7 - 5.5Vdc power supply 2 Digital I C output Standard push-in fitting sizes Custom fluid connector available Temperature compensated Highly configurable firmware Easy-to-use PC-based GUI MFC2030 30 SLM version. RoHS and WEEE compliant APPLICATIONS 2 externally powered, up to 5.5V (3.3V typ.). I C digital Medical gas flow measurement and control output is standard. Other output available upon Industrial gas flow measurement and control request. Consumer products The MFC2000 series includes firmware that is highly DESCRIPTION configurable, offering the user a variety of settings that MFC2000 series is a new gas flow sensing module can be tailored to specific applications. This includes platform based on ACEINNAs proprietary CMOS data output type, calibration settings, measurement technology for thermal mass flow sensing. It can modes, and power consumption. A user-friendly PC- measure up to 70 SLM bi-directional flow rate with +/- based application offers the user a variety of data 3.0% accuracy. collection options, including real-time graphical display. Mechanically, the unit includes fittings that The sensing element is monolithically integrated with can accept a variety of standard inlet tube sizes. CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a MFC2000 series is a true thermal mass flow sensing digital output with very high repeatability. The module module, and can easily be configured to suit a variety has very low operating power consumption (< 5 mA) of applications, from medical flow to industrial and a low power consumption sleep mode (<100 A) processing. Customized versions, including customer for optimal power management in portable specific bulk channel and mounting options are applications. The MFC2000 series is available. For more information, please contact ACEINNA at info ACEINNA.com. ACEINNA, Inc. Information furnished by ACEINNA is believed to be accurate and reliable. However, no responsibility is assumed by ACEINNA for its use, or for any infringements of patents or One Technology Drive, Suite 325, Andover, MA 01810, USA other rights of third parties, which may result from its use. No license is granted by Tel: +1 978 738 0900 Fax: +1 978 738 0196 implication or otherwise under any patent or patent rights of ACEINNA. www.ACEINNA.com ACEINNA MFC2030 v1.05 Page 1 of 8 CONFIDENTIAL SENSOR CHARACTERISTICS (Measurements performed with air at 23 C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: 20C, 1013mbar. Parameter Condition 30 SLM 70 SLM Unit Measurement Range Straight/Manifold Mounting +/- 30 +/- 70 SLM Flow Direction Bi-directional N/A Supply DC Voltage 2.7 5.5 Vdc (VDD) 1 Interface Voltage (See note 1) 2.7 3.0 V (VDDIO) 2 Output Range I2C Mode 0 65,535 LSB Operating Temperature (20) 80 C Calibrated Temperature 0 50 C Storage Temperature (40) 85 C Relative Humidity non-condensing 0 95 % Operating mode 5 mA 3 Supply Current Sleep mode 100 A 0.01Q Q < Q 3.0 % m.v. max max 4 Accuracy Q < 0.01Q 0.03 % F.S. max 0.1Q Q Q 0.8 % m.v. ODR = max max 100Hz Q < 0.1Qmax 0.08 % F.S. 5 Repeatability 0.1Q Q Q 0.3 % m.v. max max ODR = 10Hz Q < 0.1Q 0.03 % F.S. max ODR = 100Hz 25 sccm RMS Noise at Zero Flow ODR = 10Hz 8 sccm Offset Shift w/Temp. 0 - 50 C 2 SCCM/ C 4 Total Error Band 0 - 50 C, 0.1Qmax Q Q 3.5 % m.v. max Pressure Drop Q 4 18 mbar max Sample Rate 10 msec Orientation Sensitivity < 60 sccm Wake Time Wake up from sleep mode 40 msec Working Pressure 0 - 8 Bar Module Weight Includes aluminum inserts < 100 g Si, SiO , Si N , Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber, 2 3 4 Wetted Material Aluminum alloy 3003, Epoxy, Silicone 2 Note 1: VDDIO is generated internally and should be used to set the logic high voltage for I C interface. VDDIO can supply a current up to 100 mA. Note 2: Use twos complement as binary signed number representation. Note 3: Power consumption can be optimized using Power-Cycle configuration to program the wake and sleep duration. Note 4: Accuracy is defined as the sum of all dc errors (linearity) at 23C. Error Band is defined as the sum of accuracy and offset/span due to temperature. Both are measured after factory calibration, using internal averaging (100x) to eliminate errors due to noise. If the end application requires a high Output Data Rate (ODR), and cannot benefit from averaging, the total RMS error of any given measurement can be calculated by adding the repeatability specification. Note 5: Repeatability is defined as standard deviation divided by mean flow (% m.v.), or standard deviation divided by F.S. (% F.S.). Average/ODR is programmable. ACEINNA MFC2030 v1.10 Page 2 of 8 CONFIDENTIAL