Data Sheet SFM3200 Digital Flow Meter for medical applications Superior performance at very low flows Low pressure drop Inspiratory flow sensor Flow range: up to 250 slm Product Summary Sensirions patented CMOSens sensor technology, The SFM3200 sensor is Sensirions digital flow meter which combines the sensor element, signal processing and designed for high-volume applications. The SFM3200 digital calibration on a single microchip. The flow rate of a measures the flow rate of air, oxygen and other non- gas is measured by a thermal sensor element which aggressive gases with superb accuracy. A special design of assures very fast signal processing time and the flow channel results in the very low pressure drop through bidirectional measurement mode with best in class the flow body of the sensor making it extremely suitable for accuracy. The signal is internally linearized and medical ventilation and respiratory applications. temperature compensated. The SFM3200 is designed to be resilient to rough handling The well-proven CMOS technology is perfectly suited for and performs reliably at variable inlet conditions. The high-quality mass production and is the ideal choice for outstanding performance of these sensors is based on demanding and cost-sensitive OEM applications. Applications Ventilation Anesthesia Respiratory measurements Inspiratory flow measurement Drug delivery Sensor chip The SFM3200 flow meter features a fifth-generation silicon sensor chip. In addition to a thermal mass flow sensor OEM options element, the chip contains an amplifier, A/D converter, A variety of custom options can be implemented for high- EEPROM memory, digital signal processing circuitry, and volume OEM applications (custom flow rates, calibration for interface. Due to seamless integration of signal acquisition other gases, different body form factor etc.). and processing on the single silicon die significant performance and cost benefits are achieved. For a reusable version of this sensor see the SFM3200-AW datasheet. Contact us for more information. www.sensirion.com Version 1.1 May 2017 1/7 1. Sensor Performance 1.1 Physical specifications1 Parameter Condition Value Unit Flow range -100 +250 slm2 Typ. 3 Max 4 span (-40 to +80) slm 2 3 % m.v.6 6 span (-60 to +100) slm 3 5 % m.v Accuracy5 6 span whole range 7 10 % m.v 2 offset 0.05 0.1 slm 6 span <50 slm 0.6 1.0 % m.v 6 span >50 slm 1.0 2.0 % m.v 5, , Noise Level 7 8 6 span >100 slm 1.5 4.5 % m.v 2 offset 0.034 0.07 slm span 0.4 0.5 % m.v./10C Accuracy Shift Due to Temperature 5, 2 Variation 9 offset 0.015 0.02 slm /10C 6 span 0.07 % m.v. 5 Resolution (14 bit) 2 offset 0.034 slm 60 slm 100 / 0.41 150 / 0.62 Pressure drop 100 slm 250 / 0.81 300 / 0.97 Pa / inH O 2 200 slm 750 / 3.02 1100 / 4.44 1.2 Ambient Conditions Parameter Condition Value Unit T(environment)=T(gas) Calibrated Temperature Range +10 +50 C 15% rel. hum. Operating Temperature Range 10-95% rel. hum. (non cond.) +10 +50 C Storage Temperature 10-95% rel. hum. (non cond.) -25 +70 C Operating Pressure Range absolute 0.60 1.07 bar Burst Overpressure gauge 0.78 bar 1 Unless otherwise noted, all sensor specifications are valid at 25C with Vdd = 5V and absolute pressure = 966 mbar and horizontal flow direction 2 slm: mass flow measured in liters per minute at standard conditions (T = 20 C, p = 1013.25 mbar) 3 forTy a CpK of 0.67 is targeted (95% of sensors within the Typ limit) 4 forMa no sensor measured outside of this limits will be shipped and a CpK of 1.33 is targeted 5 Total accuracy/noise level/resolution is a sum of zero-point and span accuracy/noise level/resolution. 6 %m.v. = % measured value = % of reading 7 one standard deviation, measured at full sampling rate without averaging 8 noise level defined as standard deviation of individual sensor readings, measured at full sampling rate (typ: average of noise level max: at least 99.99% of sensors have a noise level below indicated value) 9 these effects need to be added to the initial values if applicable www.sensirion.com Version 1.1 May 2017 2/7