5420E-100-A-H-T Silicon Microstructures

Small Absolute Pressure Sensor SM5420E Series FEATURES Improved stability with integrated field shields Small SO8 surface-mount package 95 millivolt span Constant current or constant voltage drive Ported or non-ported configurations Wide operating temperature range (-40 to +125C) Integrated die-level ESD protection Qualified using AEC-Q100 Grade 1 standards DESCRIPTION The SM5420E is a small outline SO8 packaged pressure sensor that The SM5420E is available in a ported and non-ported option. The package incorporates SMIs new SM5108E MEMS piezoresistive pressure is designed to be immersed in the media that is measured. The standard sensing die. The SM5420E has been optimized to provide the highest configuration offers a protective gel over the die. The SM5420E is shipped possible stability for a package of this size. Performance is achieved tape & reel. through careful resistor placement and mechanical configuration along with advanced MEMS processing. The packaged sensor is intended for high volume applications where cost is a critical factor, such as consumer and automotive products. The SM5420E is available as an absolute pressure sensor in full-scale ranges of 30, 60 and 100PSI. It is designed to be surface-mounted on substrates by high-volume OEM manufacturers. Automotive Industrial Consumer Tire Pressure Monitoring Systems (TPMS) Handheld Meters Sports Equipment Engine Control Pneumatic Gauges Appliances Barometric Sensing Pressure Switches Altitude Correction Detection Silicon Microstructures, Inc. 2001-2016. All rights reserved +1-(408) 577-0100 sales si-micro.com I www.si-micro.com DOC 40DS5468.02 Page 1www.si-micro.com SM5420E Series ABSOLUTE MAXIMUM RATING TABLE o All parameters are specified at VSUPPLY = 5.00 V DC supply at 25 C, unless otherwise noted. All parts are covered with gel. No. Characteristic Symbol Minimum Typical Maximum Units 1 Supply Voltage V 0.0 - 6.5 V DD (a) 2 Supply Current I 0.0 - 0.725 mA DD 3 Operating Temperature Range T -40 - +125 C OP 4 Storage Temperature Range T -55 - +150 C STG Notes: a. When used in constant current configuration Proof Pressure Burst Pressure No. Product Number Operating Pressure (b) (b) (P ) (P ) PROOF BURST 5 SM5420E-030-A-H-T 0-30 PSI 90 PSI 150 PSI 6 SM5420E-030-A-P-T 7 SM5420E-060-A-H-T 0-60 PSI 180 PSI 200 PSI 8 SM5420E-060-A-P-T 9 SM5420E-100-A-H-T 0-100 PSI 200 PSI 200 PSI 10 SM5420E-100-A-P-T Notes: b. Tested on a sample basis OPERATING CHARACTERISTICS TABLE All parameters are specified at V = 5.0 V DC supply at 25C, unless otherwise noted. DD No. Characteristic Symbol Minimum Typical Maximum Units (d) 11 Span V 65 95 135 mV SPAN 12 Zero Offset V -35 0 35 mV ZERO (e, f) o 13 TC Span TCS -0.240 -0.200 -0.155 %FS/ C (e, f) o 14 TC Zero Offset TCZ -0.07 +0.07 %FS/ C (e, f) 15 TC Resistance TCR +0.15 +0.27 %RB/C (30 PSI) (e, g) 16 Linearity NL -0.2 +0.2 %FS 17 Bridge Resistance R 5 6 7 k B Notes: d. The device can only be driven with the supply voltage connected to the pins as shown. The positive output will increase with increasing pressure applied to the package. e. Tested on a sample basis. f. Determined by measurements taken at -40C and 125C. g. Defined as best fit straight line. Silicon Microstructures, Inc. 2001-2016. All rights reserved +1-(408) 577-0100 sales si-micro.com I www.si-micro.com DOC 40DS5468.02 Page 2