B58601G5010A001 TDK

Pressure sensors C41 series Series/Type: Gauge pressure sensor die Ordering code: Date: 2009-08-03 Version: 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers Please fill in the table and then change the color towhit. This ensures that the table disappears (invisible) for the customer PDF. Don t change formatting when entering or pasting text in the table and don t add any cell or line in and to it Identification/Classification 1 Pressure sensors (header 1 + top left bar): Identification/Classification 2 C41 series (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Gauge pressure sensor die Preliminary data (optional): (if necessary) AS SEN PD EPCOS AG 2015. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS prior express consent is prohibited. EPCOS AG is a TDK Group Company. Pressure sensors C41 series Gauge pressure sensor die Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Dimensions: 5.05 5.05 mm Square diaphragm Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 25 up to 60 mbar Options Temperature sensing diode Delivery mode Tray Dimensional drawings allowable edge disruptions 100 m max. allowable edge disruptions 100 m max. electrical diagram X1 X9 R2 X8 X1 : VDD+ R1 Si 100 glass X5 X2 X2 : Vout+ X3 : VDD R3 R4 X4 : VDD Note1: geometry of diaphragm checked bond pads X5 : Vout+ all dimensions in m depend on specification X8 : Diode (N) X4X3 X9 : Diode (P) X12: Substrate AS SEN PD 2009-08-03 Please read Cautions and warnings and Page 2 of 8 Important notes at the end of this document.