MS54XX Miniature SMD Pressure Sensor SPECIFICATIONS 1, 7, and 12 bar absolute pressure range Uncompensated FEATURES Piezoresistive silicon micromachined sensor Miniature surface mount Low cost SMD package Ceramic carrier Small size Low noise, high sensitivity, high linearity High reliability, low drift -40 C to +125 C operation The MS54XX SMD pressure sensor series is designed for pressure range sensor systems with highest demands on resolution and accuracy. The Gel protection against humidity device consists of a silicon micromachined pressure sensor die mounted and water on a 6.2 x 6.4 mm ceramic carrier. The MS54XX can be delivered in a high sensitivity version giving a maximal output voltage or in a high APPLICATIONS linearity version. Both versions provide an output voltage directly High resolution altimeters, proportional to the applied pressure. variometers Barometers Engine management Waterproof watches and diving computers High Sensitivity Versions High Linearity Versions Carrier Full scale Full Full Product Product pressure scale Linearity scale Linearity code code span span 1 bar MS5401-AM 240 mV 0.20 % FS MS5401-BM 150 mV 0.05 % FS Ceramic 7 bar MS5407-AM 392 mV 0.20 % FS 12 bar MS5412-BM 150 mV 0.05 % FS SENSOR SOLUTIONS ///MS54XX Page 1 06/2018 MS54XX Miniature SMD Pressure Sensor PERFORMANCE SPECIFICATIONS ABSOLUTE MAXIMUM RATINGS Parameter Symbol Conditions Min Max Unit Supply voltage VS+ Ta = 25 C - 20 V Storage temperature TS -40 +125 C Overpressure MS5401-AM - - 5 MS5401-BM (1) P Ta = 25 C - 10 bar MS5407-AM (2) - 21 MS5412-BM - 30 NOTES 1) The MS5401-BM is qualified referring to ISO Standard 22810 and can withstand an absolute pressure of 11 bar in salt water or 100 m water respectively. 2) The MS5407-AM is qualified referring to ISO Standard 22810 and can withstand an absolute pressure of 21 bar in salt water or 200 m water specifically. ELECTRICAL CHARACTERISTICS HIGH SENSITIVITY VERSION (Vs+ = 5 V Ta = 25 C) Parameter Min Typ Max Unit Notes Operating pressure range 0 - 1 bar Full-scale span (FS) 190 240 290 mV MS5401-AM Sensitivity 190 240 290 mV/bar Linearity - 0.15 0.40 % FS 1, 6 Operating pressure range 0 - 7 bar Full-scale span (FS) 322 392 462 mV MS5407-AM Sensitivity 46 56 66 mV/bar Linearity 0.15 040 % FS 1, 6 Operating temperature range -40 - 125 C Zero pressure offset -40 0 40 mV Pressure hysteresis - - 0.20 % FS 2, 6 Temperature hysteresis - 0.3 0.8 % FS 3, 6 All Ranges Repeatability - - 0.20 % FS 4, 6 Bridge resistance 3.0 3.4 3.8 k Temperature coefficient of resistance +2 400 2 900 +3 300 ppm/C 5, 6 Temperature coefficient of span -1 500 -1 900 -2 300 ppm/C 5, 6 Temperature coefficient of offset -80 - +80 V/C 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal cycle from -40C to +125C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25C to 60C. 6) Not 100% tested. 06/2018 SENSOR SOLUTIONS ///MS54XX Page 2