Precision MEMS IMU Module Data Sheet ADIS16467 FEATURES GENERAL DESCRIPTION Triaxial, digital gyroscope The ADIS16467 is a precision, microelectric mechanical system 125/sec, 500/sec, 2000/sec dynamic range models (MEMS), inertial measurement unit (IMU) that includes a triaxial 2/hr in-run bias stability (ADIS16467-1) gyroscope and a triaxial accelerometer. Each inertial sensor in 0.15/hr angular random walk (ADIS16467-1 and the ADIS16467 combines with signal conditioning to optimize ADIS16467-2) dynamic performance. The factory calibration characterizes 0.05 axis to axis misalignment error each sensor for sensitivity, bias, alignment, linear acceleration Triaxial, digital accelerometer, 40 g (gyroscope bias), and point of percussion (accelerometer location). 13 g in-run bias stability Therefore, each sensor has dynamic compensation formulas Triaxial, delta angle, and delta velocity outputs that provide accurate sensor measurements over a broad set of Factory calibrated sensitivity, bias, and axial alignment conditions. Calibration temperature range: 40C to +85C The ADIS16467 provides a simple, cost effective method for SPI-compatible data communications integrating accurate, multiaxis inertial sensing into industrial Programmable operation and control systems, especially when compared to the complexity and Automatic and manual bias correction controls investment associated with discrete designs. All necessary motion Data ready indicator for synchronous data acquisition testing and calibration are part of the production process at the External sync modes: direct, pulse, scaled, and output factory, greatly reducing system integration time. Tight orthogonal On demand self test of inertial sensors alignment simplifies inertial frame alignment in navigation On demand self test of flash memory systems. The serial peripheral interface (SPI) and register structure Single-supply operation (VDD): 3.0 V to 3.6 V provide a simple interface for data collection and configuration 2000 g mechanical shock survivability control. Operating temperature range: 40C to +105C The ADIS16467 is in an aluminum module package that is APPLICATIONS approximately 22.4 mm 24.3 mm 9 mm with a 14-lead Navigation, stabilization, and instrumentation connector interface. Unmanned and autonomous vehicles Smart agriculture and construction machinery Factory/industrial automation, robotics Virtual/augmented reality Internet of Moving Things FUNCTIONAL BLOCK DIAGRAM DR RST VDD POWER SELF TEST INPUT/OUTPUT GND MANAGEMENT OUTPUT CS TRIAXIAL DATA GYROSCOPE REGISTERS SCLK CALIBRATION TRIAXIAL SPI CONTROLLER AND ACCELEROMETER DIN FILTERS USER CONTROL TEMPERATURE REGISTERS DOUT SENSOR CLOCK ADIS16467 SYNC Figure 1. Rev. C Document Feedback Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. rights of third parties that may result from its use. Specifications subject to change without notice. Tel: 781.329.4700 20172020 Analog Devices, Inc. All rights reserved. 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Technical Support www.analog.com 15439-001ADIS16467 Data Sheet TABLE OF CONTENTS Features .............................................................................................. 1 Device Configuration ................................................................ 15 Applications ...................................................................................... 1 User Register Memory Map .......................................................... 16 General Description ......................................................................... 1 User Register Defintions ............................................................... 18 Functional Block Diagram .............................................................. 1 Gyroscope Data .......................................................................... 18 Revision History ............................................................................... 2 Delta Angles ................................................................................ 21 Specifications .................................................................................... 3 Delta Velocity ............................................................................. 22 Timing Specifications .................................................................. 5 Calibration .................................................................................. 24 Absolute Maximum Ratings ....................................................... 7 Applications Information ............................................................. 31 Thermal Resistance ...................................................................... 7 Assembly and Handling Tips ................................................... 31 ESD Caution.................................................................................. 7 Power Supply Considerations .................................................. 31 Pin Configuration and Function Descriptions ............................ 8 Breakout Board ........................................................................... 31 Typical Performance Characteristics ............................................. 9 Serial Port Operation ................................................................. 32 Theory of Operation ...................................................................... 11 Digital Resolution of Gyroscopes and Accelerometers ........ 32 Introduction ................................................................................ 11 PC-Based Evaluation Tools ...................................................... 33 Inertial Sensor Signal Chain ..................................................... 11 Packaging and Ordering Information ......................................... 34 Register Structure ....................................................................... 12 Outline Dimensions ................................................................... 34 Serial Peripheral Interface (SPI) ............................................... 13 Ordering Guide .......................................................................... 34 Data Ready (DR) ........................................................................ 13 Reading Sensor Data .................................................................. 14 REVISION HISTORY 2/2020Rev. B to Rev. C 2/2019Rev. 0 to Rev. A Changes to Table 1 ........................................................................... 3 Changes to Table 1 ............................................................................ 3 Added Figure 18 ............................................................................. 10 Changes to Table 2 ............................................................................ 5 Changes to Reading Sensor Data Section and Burst Read Changes to Figure 5 .......................................................................... 6 Function Section ............................................................................. 14 Added Figure 11, Figure 12, and Figure 13 Renumbered Sequentially ........................................................................................ 9 Added Figure 14, Figure 15, Figure 16, and Figure 17 .............. 10 4/2019Rev. A to Rev. B Changes to Figure 18, Figure 19, and Figure 20 ........................ 11 Changes to Serial Peripheral Interface (SPI) Section ................ 13 Changes to Figure 22 and Figure 23 ............................................ 12 Changes to Figure 32 ..................................................................... 14 Added Gyroscope Data Width (Digital Resolution) Section ... 18 Changes to Table 10 ....................................................................... 18 Changes to Gyroscope Measurement Range/Scale Factor Section, Changes to Gyroscope Data Section ............................................ 18 Table 11, Table 12, Table 13, Table 17, Table 21, and Table 25 19 Changes to Acceleration Data Section ........................................ 19 Added Accelerometer Data Width (Digital Resolution) Section Added Accelerometer Data Formatting Section ........................ 20 ........................................................................................................... 20 Deleted Accelerometer Resolution Section ................................ 20 Change to Calibration, Accelerometer Bias (XA BIAS LOW Added Serial Port Operation Section, Maximum Throughput and XA BIAS HIGH) Section ..................................................... 25 Section, and Serial Port SCLK Underrun/Overrun Conditions Change to Filter Control Register (FILT CTRL) Section ........ 26 Section .............................................................................................. 32 Changes to Direct Sync Mode Section ........................................ 27 Added Digital Resolution of Gyroscopes and Accelerometers Changes to Pulse Sync Mode Section .......................................... 28 Section .............................................................................................. 32 Changes to Sensor Self Test Section ............................................ 29 Moved Gyroscope Data Width (Digital Resolution) Section ........ 32 Changes to Figure 52 ..................................................................... 31 Moved Accelerometer Data Width (Digital Resolution) Section . 32 Changes to Outline Dimensions .................................................. 33 12/2017Revision 0: Initial Version Rev. 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