MS9000.D / Single axis analog accelerometer
30S.MS9XXX.K.03.12
Features
Energy
Inertial
Mil/Aerospace Tilt 1g to 200g range
Excellent bias stability (less than 0.05% of full scale)
Industrial Vibration
Single power supply (+2.5V to +5.5V, ratiometric voltage output)
Low power
Seismic
Extra small 20 pin LCC ceramic package with hermetic sealing (8.9mm x 8.9mm)
Individually calibrated (bias, scale factor and non linearity)
Brown out protected
RoHS compliant suitable for lead free soldering process and SMD mounting
The MS9000 product is a single axis MEMS capacitive accelerometer based on a bulk micro-machined silicon element specifically
designed for high stability, a low power ASIC for signal conditioning, a micro-controller for storage of compensation values and a
temperature sensor. The product is low power, fully calibrated, robust and extremely stable and the electronic configuration provides a
solid power on reset and ensures a full protection against brown-out.
It operates from a single power supply voltage (between +2.5V and +5.5V) with low current consumption (< 0.5mA at 5V). The output is
a ratiometric analog voltage that varies between +0.5V and +4.5V for the full-scale acceleration range at a voltage supply of +5V. The
sensor is fully self-contained and packaged in a 20-pin LCC ceramic housing, thus insuring a full hermeticity.
Accelerometer specifications All values are specified at +20C (+68F) and 5.0 VDC supply voltage, unless otherwise stated
Units MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200
Full scale range g 1g 2g 5g 10g 30g 50g 100g 200g
Bias calibration mg < 5 < 10 < 25 < 50 < 150 < 250 < 500 < 1000
One year bias stability @ 6000g [1] mg typ. (max.) 0.75 (< 2.5) 1.5 (< 5) 3.75 (< 12.5) 7.5 (< 25) 22 (< 75) 37.5 (< 125) 75 (< 250) 150 (< 500)
One year bias stability @ 1000g [2] mg typ. (max.) 0.15 (< 0.75) 0.3 (< 1.5) 0.75 (< 3.75) 1.5 (< 7.5) 4.5 (< 22.5) 7.5 (< 37.5) 15 (< 75) 30 (< 150)
Switch on/off repeatability mg max. < 0.1 < 0.15 < 0.375 < 0.75 < 1.5 < 3.8 < 7.5 < 15
Bias temp. coefficient [3] mg/C typ. < 0.05 < 0.1 < 0.25 < 0.5 < 1.5 < 2.5 < 5 < 10
mg/C max. 0.2 0.4 1 2 6 10 20 40
Scale factor sensitivity (K1) mV/g 2000 8 1000 8 400 4 200 2 66.6 1 40 1 20 1 10 1
One year scale factor stability [1] & [2] ppm typ. (max.) 300 (< 1000) 300 (< 1000) 300 (< 1000) 300 (< 1000) 300 (< 1000) 300 (< 1000) 300 (< 1000) 300 (< 1000)
Scale factor temp. coefficient [3] ppm / C typ. 100 100 100 100 100 100 100 100
min. / max. -50 / 250 -50 / 250 -50 / 250 -50 / 250 -50 / 250 -50 / 250 -50 / 250 -50 / 250
Input axis misalignment (Kp, Ko) mrad max. < 10 < 10 < 10 < 10 < 10 < 10 < 10 < 10
% max 1 1 1 1 1 1 1 1
Resolution / Threshold (@ 1Hz) mg max. < 0.05 < 0.1 < 0.25 < 0.6 < 1.7 < 2.8 < 5.5 < 11
Non linearity % of FS max. < 1 < 0.8 < 0.8 < 0.9 < 0.9 < 0.9 < 1 < 1 [5]
g max. < 0.01 < 0.02 < 0.04 < 0.09 < 0.27 < 0.50 < 1 < 2 [5]
Bandwidth [4] Hz 0 to 100 0 to 100 0 to 100 0 to 100 0 to 100 0 to 100 0 to 100 0 to 100
Noise spectral density in band 18 18 18 18 18 18 18 18
V/ Hz typ.
(0 ; 9kHz) max. 24 24 24 24 24 24 24 24
Resonant frequency kHz 1.4 2.9 3.7 6.3 11 15 26
[1] One year stability defined according to IEEE 528-2001: turn on / on, storage at -55C and 85C, -40C to 125C T cycling, -55C to 85C unpowered
harass, vibration, shock (6000g, single shock in one axis).
[2] One year stability defined according to IEEE 528-2001: turn on / on, storage at -55C and 85C, -40C to 125C T cycling, -55C to 85C unpowered
harass, vibration, shock (1000g, single shock in one axis).
[3] Temperature coefficients are specified for a range of 40C to 20C, where temperature behavior is typically linear and coefficient are maximum.
[4] The bandwidth is defined as the frequency band for which the sensitivity has decreased by less than 3dB.
[5] The non linearity specification for 200g version is validated to maximum 100g range.
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30S.MS9XXX.K.03.12
Environmental specifications
MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200
Operating temperature range -55C to +125C (-67F to 255F)
Reliability Results based on MIL-HDBK-217, notice 2, are available on request.
Shock resistance Up to 6000 g (0.15ms half-sine, single shock, not repetitive, in one direction o, p or i)
Recovery time < 1ms (1000g, half-sine period 1ms, shocks in direction i)
Vibration 20 g rms, 20-2000 Hz (random noise, 30 minutes in each direction o, p, i)
ESD sensitivity Class 2 (requirements MIL-STD-883-G, 1 Method 3015.7), Human Body Model 2kV
Ultrasonic cleaning The product cant be cleaned with ultrasonic bath. Such a cleaning process will largely affect the sensor integrity
Packaging
The packaging is a standard LCC ceramic housing with a total of 20 pins. The precise dimensions are given in the next figure and the
weight of the final product is typically smaller than 1.5 grams
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The sealing process is qualified according to the MIL-STD-883-G and systematical leak tests are performed up to 510 atmcm /s.
SMD Mounting
The MS9000 is RoHS compliant suitable for lead free soldering process and SMD mounting. It must be tightly fixed to the PCB, using
the bottom of the housing as reference plane to ensure a good axis alignment. The stress induced by the soldering of the LCC package
is a specific MEMS concern, especially when it comes to high-end capacitive sensors. In order to obtain good stress homogeneity and
the best long term stability, all the leads of the accelerometer must be soldered to the pads of the PCB. See the Colibrys Application
Note LCC-48 housing, soldering conditions available on our web site for more information about the LCC mounting process in general.
Physical specifications
MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200
Packaging Non magnetic, LCC, 20 pin housing
Lead finishing Au plating: 0.5 to 1.5 m
Ni plating: 1.27 to 8.89 m (typ. 3 to 5 m)
W (tungsten): 10 to 15 m
Hermeticity The product has been qualified according to MIL-STD-833-G. Hermetic sealing is systematically qualified at
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510 atmcm /s
Weight < 1.5 grams
Size Typ. 8.9 x 8.9 x 3.23 mm (0.35 x 0.35 x 0.127 inch)
Max. 9.2 x 9.2 x 3.5 mm (0.354 x 0.354 x 0.138 inch)
Proximity effect The sensor is sensitive to external parasitic capacitance. Moving metallic objects with large mass or parasitic
effect at proximity of the accelerometer (mm range) must be avoided to insure best product performances.
Reference plane for axis alignment LCC must be tightly fixed to the PCB, using the bottom of the housing as reference plane for axis alignment.
Using the lid as reference plane or for assembly may affect specifications and product reliability (i.e. axis
alignment and/or lid soldering integrity)
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