SCA121T-D09 Murata

SCA121T Series Data Sheet THE SCA121T DUAL AXIS INCLINOMETER MODULES The SCA121T Series contain 3D-MEMS-based dual axis inclinometer modules that provide instrumentation grade performance for leveling applications in harsh environment. The measuring axes of the sensing elements are parallel to the mounting plane and orthogonal to each other. Low temperature dependency, high resolution and low noise, together a with robust sensing element design, make the SCA121T the ideal choice for leveling instruments. The Murata inclinometers are insensitive to vibration, due to their over damped sensing elements, and can withstand mechanical shocks of up to 20000 g. Features Dual axis inclination measurement (X and Y) RoHS compliant Measuring ranges 30 and 90 0.0025 resolution (10 Hz BW, analog output) Sensing element controlled over damped frequency response (-3dB 18Hz) Robust design, high shock durability (20000g) High stability over temperature and time Single +5 V supply and unregulated 735V supply Applications Platform leveling and stabilization Leveling instruments 360 vertical orientation measurement Construction levels Murata Electronics Oy Subject to changes 1/5 www.muratamems.fi Doc.Nr. 82 1274 00 Rev.A SCA121T Series TABLE OF CONTENTS The SCA121T Dual Axis Inclinometer modules ..................................................................... 1 Features............................................................................................................................................. 1 Applications ...................................................................................................................................... 1 Table of Contents...................................................................................................................... 2 1 Electrical Specifications ..................................................................................................... 3 1.1 Absolute Maximum Ratings ................................................................................................... 3 1.2 Performance Characteristics .................................................................................................. 3 1.3 Electrical Characteristics ....................................................................................................... 4 1.4 Electrical Connection.............................................................................................................. 4 2 Functional Description ....................................................................................................... 4 2.1 Measuring Directions .............................................................................................................. 4 2.2 Voltage to Angle Conversion ................................................................................................. 4 2.3 Ratiometric Output .................................................................................................................. 5 3 Mechanical Specifications .................................................................................................. 5 3.1 Sensor dimensions ................................................................................................................. 5 Murata Electronics Oy Subject to changes 2/5 www.muratamems.fi Doc. nr. 82 1274 00 Rev.A