MPVZ5010G Freescale Semiconductor Rev 0, 09/2005 Technical Data Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, MPVZ5010G SERIES Temperature Compensated and Calibrated The MPVZ5010G series piezoresistive transducers are state-of-the-art monolithic silicon pressure sensors designed for the appliance, consumer, INTEGRATED healthcare, industrial and automotive market. The analog output can be read PRESSURE SENSOR directly into the A/D input of Freescale microcontrollers. This transducer 0 to 10 kPA (0 to 1019.78 mm H O) 2 combines advanced micromachining techniques, thin-film metallization, and 0.2 to 4.7 V OUTPUT bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. The axial port has been modified to accommodate industrial grade tubing. SMALL OUTLINE PACKAGE Features SURFACE MOUNT 5.0% Maximum Error over 0 to 85C Temperature Compensated over -40 to +125C Durable Thermoplastic (PPS) Package Available in Surface Mount (SMT) or Through-hole (DIP) Configurations Application Examples MPVZ5010GW6U MPVZ5010G6U/T1 Washing Machine Water Level Measurement (Reference AN1950) CASE 1735-01 CASE 482-01 Ideally Suited for Microprocessor or Microcontroller-Based Systems Appliance Liquid Level and Pressure Measurement Respiratory Equipment SMALL OUTLINE PACKAGE THROUGH-HOLE ORDERING INFORMATION J Device Case MPVZ Series Packing Device Type No. Order No. Options Marking Surface Mount 1735-01 MPVZ5010GW6U Rails MZ5010GW Through-Hole 1560-02 MPVZ5010GW7U Rails MZ5010GW MPVZ5010GW7U MPVZ5010G7U Surface Mount 482-01 MPVZ5010G6U Rails MZ5010G CASE 1560-02 CASE 482B-03 Surface Mount 482-01 MPVZ5010G6T1 Tape & Reel MZ5010G Through-Hole 482B-03 MPVZ5010G7U Rails MZ5010G (1) PIN NUMBERS 1 N/C 5 N/C 2 V 6 N/C S 3 GND 7 N/C 4 V 8 N/C OUT 1. Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead. Freescale Semiconductor, Inc., 2005. All rights reserved.V S Thin Film Gain Stage 2 Temperature and Sensing V Compensation Ground out Element and Reference Gain Stage 1 Shift Circuitry Pins 1 and 5 through 8 are NO CONNECTS for surface mount package GND Pins 4, 5, and 6 are NO CONNECTS for unibody package Figure 1. Fully Integrated Pressure Sensor Schematic (1) Table 1. Maximum Ratings Rating Symbol Value Unit Maximum Pressure (P1 > P2) P 40 kPa max Storage Temperature T 40 to +125 C stg Operating Temperature T 40 to +125 C A 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPVZ5010G Sensors 2 Freescale Semiconductor