Freescale Semiconductor, Inc. Order this document SEMICONDUCTOR TECHNICAL DATA by MPXAZ4115A/D ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 % % % % & &% & % % % % % INTEGRATED PRESSURE SENSOR %& % 15 to 115 kPa (2.2 to 16.7 psi) 0.2 to 4.8 V Output % Motorolas MPXAZ4115A series sensor integrates onchip, bipolar op amp circuitry and SMALL OUTLINE PACKAGE thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of onchip integration make the Motorola pressure sensor a logical and economical choice for the system designer. The MPXAZ4115A series piezoresistive transducer is a stateoftheart, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. MPXAZ4115AC6U CASE 482A Features Resistant to high humidity and common automotive media 1.5% Maximum Error over 0 to 85C Ideally suited for Microprocessor or Microcontroller Based Systems Temperature Compensated from 40 to +125C Durable Thermoplastic (PPS) Surface Mount Package Application Examples MPXAZ4115A6U CASE 482 Aviation Altimeters Industrial Controls Engine Control PIN NUMBER Weather Stations and Weather Reporting Devices N/C 1 N/C 5 N/C 2 V 6 S ( % N/C 3 Gnd 7 N/C 4 V 8 out NOTE: Pins 1, 5, 6, 7, and 8 are not device connections. Do not connect to & %& external circuitry or ground. Pin 1 is & & noted by the notch in the lead. % % % & ( 7< & %& % & & + % &% % & ( Figure 1. Fully Integrated Pressure Sensor Schematic Rev 0 Motorola Sensor Device Data 1 For More Information On This Product, Motorola, Inc. 2001 Go to: www.freescale.com Freescale Semiconductor, Inc... ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Freescale Semiconductor, Inc. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 (NOTE) MAXIMUM RATINGS Parametrics Symbol Value Units Maximum Pressure (P1 P2) P 400 kPa max Storage Temperature T 40 to +125 C stg Operating Temperature T 40 to +125 C A NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device. OPERATING CHARACTERISTICS (V = 5.1 Vdc, T = 25C unless otherwise noted, P1 P2. Decoupling circuit shown in Figure 3 S A required to meet Electrical Specifications.) Characteristic Symbol Min Typ Max Unit Pressure Range P 15 115 kPa OP (1) Supply Voltage V 4.85 5.1 5.35 Vdc S Supply Current I 7.0 10 mAdc o (2) Minimum Pressure Offset (0 to 85C) V 0.135 0.204 0.273 Vdc off V = 5.1 Volts S (3) Full Scale Output (0 to 85C) V 4.725 4.794 4.863 Vdc FSO V = 5.1 Volts S (4) Full Scale Span (0 to 85C) V 4.521 4.590 4.659 Vdc FSS V = 5.1 Volts S (5) Accuracy (0 to 85C) 1.5 %V FSS Sensitivity V/P 45.9 mV/kPa (6) Response Time t 1.0 ms R Output Source Current at Full Scale Output I 0.1 mAdc o+ (7) WarmUp Time 20 ms (8) Offset Stability 0.5 %V FSS NOTES: 1. Device is ratiometric within this specified excitation range. 2. Offset (V ) is defined as the output voltage at the minimum rated pressure. off 3. Full Scale Output (V ) is defined as the output voltage at the maximum or full rated pressure. FSO 4. Full Scale Span (V ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the FSS minimum rated pressure. 5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span at 25C due to all sources of error including the following: Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Warmup Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized. 8. Offset Stability is the products output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test. 2 Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com Freescale Semiconductor, Inc... ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005