Freescale Semiconductor Document Number: MPXHZ6116A Data Sheet: Technical Data Rev. 2.1, 06/2015 MPXHZ6116A, 20 to 115 kPa, MPXHZ6116A Absolute, Integrated Pressure Sensor The MPXHZ6116A series pressure sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The sensors packaging has been designed to Super small outline package provide resistance to high humidity conditions as well as common automotive media. The small form factor and high reliability of on-chip integration make this sensor a logical and economical choice for the system designer. The MPXHZ6116A series pressure sensor is a state-of-the-art, monolithic, signal conditioned sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This MPXHZ6116A6U/6T1 piezoresistive transducer combines advanced micromachining techniques, thin- Case 98ARH99066A film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features Top view Resistant to high humidity and common automotive media 1.5% maximum error over 0 C to 85 C DNC 5 4 V OUT Temperature compensated from -40 C to +125 C DNC 6 3 GND Durable thermoplastic (PPS) surface mount package (SSOP) DNC 7 2 V S Ideally suited for microprocessor or microcontroller-based systems DNC 8 1 DNC Pin 1 identification, chamfered corner Pinout Ordering information of Ports Pressure type Device Part number Shipping Package marking None Single Dual Gauge Differential Absolute Small Outline Package (MPXHZ6116A series) 98ARH99066A MPXHZ6116A6U Rail MPHZ6116A 98ARH99066A MPXHZ6116A6T1 Tape and Reel MPHZ6116A Freescale reserves the right to change the detail specifications as may be required to permit improvements in the design of its products. 2009. 2010, 2015 Freescale Semiconductor, Inc. All rights reserved.Contents 1 General Description 3 1.1 Block diagram . 3 1.2 Pinout . 3 2 Mechanical and Electrical Specifications . 4 2.1 Maximum ratings . 4 2.2 Operating characteristics 4 3 On-chip Temperature Compensation and Calibration 5 3.1 Minimum recommended footprint for super small packages . 7 3.2 Package dimensions 8 4 Revision History 11 Related Documentation The MPXHZ6116A device features and operations are described in a variety of reference manuals, user guides, and application notes. To find the most-current versions of these documents: 1. Go to the Freescale homepage at: