SM5430/SM5470 Low Cost Packaged Pressure Sensors Surface Mount and DIP Pressure Sensors Low-Cost Packaged Die DESCRIPTION Silicon Microstructures provides its two most popular pressure sensor die in surface mount dual in-line package (SO16) configuration. All parts in these series are uncompensated high-performance die mounted in an injection-molded package designed for surface mounting. These packaged sensor die provide a way for OEM manufacturers to incorporate pressure sensors at costs close to raw die prices, without the need to handle, attach or FEATURES wire bond silicon sensor die. Options include variety of pressure ranges, Low pressure (from 0-0.15 to 0-60 PSI Full Scale) absolute or gauge pressure types, and a choice of cap configurations. The result is a Easy to Use versatile product line suitable for a wide Compact and Light-weight range of applications. High-performance, Stable Silicon Chip and Package The low-pressure series (model SM5470) Easily Embedded in OEM Equipment incorporates Silicon Microstructures unique High-volume, Low Cost low-pressure die to achieve high Available in Tape and Reel or IC Sticks performance in pressure ranges from 0.15 PSI to 3.0 PSI full-scale in gauge and differential. APPLICATIONS The model SM5430 comes in gauge, Altimeters differential, and absolute for pressure Barometric Correction ranges from 5 PSI to 60 PSI full scale. Tire Gauges Digital Pressure Gauges Environmental Monitoring Appliances Consumer and Sports HVAC Medical Instrumentation and Monitoring Pressure Differential and Flow Monitoring Hand-held Gauges 40SP5012.01 06 11 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 sales si-micro.com www.si-micro.com SM5430/SM5470 Low Cost Packaged Pressure Sensors ABSOLUTE MAXIMUM RATING TABLE FOR SM5430/5470 SENSOR All parameters measure at 5 V excitation at room temperature, unless otherwise specified. All Models Parameter Min. Typ. Max. Units Notes 0 5.0 10.0 V Excitation Voltage 0 1.5 3.0 mA Excitation Current -50 -5 +50 mV Zero Offset SM5470 -50 0 +50 mV SM5430 -15 -19 -24 %FS/100C 1, 4 TC Span 33 28 25 %/100C 1, 4 TC Resistance 2.7 3.3 4.0 k Bridge Impedance -40 85 C 4 Operating Temp -40 85 C 4 Storage Temp SM5430 Standard Pressure Series Span (FS Range), PSI (kPa) Min. Typ. Max. Units Notes 75 100 125 mV 5 (34) 105 145 175 mV 15 (103) 115 165 195 mV 30 (207) 115 180 220 mV 60 (414) -0.2 +0.07 +0.2 %FS 3, 4 Linearity -5 -1 +5 %FS/100C 1, 4 TC Offset >5X Rated FS Pressure 2, 4 Burst Pressure SM5470 Low Pressure Series Only Span (FS Range), PSI (kPa) Min. Typ. Max. Units Notes 25 50 85 mV 0.15 (1.03) 25 50 85 mV 0.30 (2.07) 25 50 85 mV 0.80 (5.52) 25 50 85 mV 1.50 (10.3) 25 50 85 mV 3.00 (20.7) -0.3 +0.1 +0.3 %FS 3, 4 Linearity -12 +12 %FS/100C 1, 4 TC Offset 15X Rated FS Pressure 2, 4 Burst Pressure Notes: 1. Measured from 0 to 70C 2. Sensor die will survive pressure specified for all ranges. Maximum package pressure is 150 PSI. 3. Defined as best-fit straight line (BFSL) for 0.3 PSI full-scale, linearity is +0.5%FS. For 0.15 PSI full-scale, linearity is +2.5% Full-Scale. 4. Tested on a sample basis. ORDERING INFORMATION Pressure Type Std. Pressure Low Pressure A: Absolute (except 5470) Ranges Ranges G: Gauge PSI 5430 PSI 5470 D: Differential 5 005 0.15 001 SM5470 - 008 - G - B 15 015 0.30 003 Available Cap Type 30 030 0.80 008 B: Horizontal Barbed Port(s) 60 060 1.50 015 3.00 030 40SP5012.01 06 11 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 sales si-micro.com www.si-micro.com