Low Pressure 27 45 131 Digital Sensor 167 SM6221, SM6321, SM6421 Series 170 Gauge & Differential Pressure Sensors 175 FEATURES 169 0 Pressure ranges from 0.3 to 0.79 psi gauge, differential and 61 asymmetric outputs Accuracy: 1% full scale 14-bit digital, pressure calibrated and temperature compensated output 2 I C Digital Interface o Compensated temperature range: -20 to 85 C Insensitive to mounting orientation Robust JEDEC SOIC-16 package for automated assembly Manufactured according to ISO9001 and ISO/TS 16949 standards DESCRIPTION The SM6X21 Series is a digital, low pressure MEMS sensor family Combining the pressure sensor with a signal-conditioning ASIC in a offering state-of-the-art pressure transducer technology and CMOS single package simplifies the use of advanced silicon micro-machined mixed signal processing technology to produce a digital, fully pressure sensors. The pressure sensor can be mounted directly on a conditioned, multi-order pressure and temperature compensated standard printed circuit board and a high level, calibrated pressure sensor in JEDEC standard SOIC-16 package with a dual vertical signal can be acquired from the digital interface. This eliminates the porting option. It is available in both compound gage or differential need for additional circuitry, such as a compensation network or pressure configurations. With the dual porting, a vacuum-gage microcontroller containing a custom correction algorithm. measurement is possible to minimize altitude errors due to changes in ambient pressure. Customer-specified pressure ranges and supply voltages are available. The SM6X21 is shipped in sticks or tape & reel. Medical Industrial Consumer Sleep Apnea Airflow Measurement Sports Equipment CPAP Pneumatic Gauges Appliances Ventilators Pressure Switches Gas Flow Instrumentation Safety Cabinets Air Flow Monitors Life Sciences Negative Pressure Wound Therapy Gas Flow Instrumentation Silicon Microstructures, Inc. 2001-2017. All rights reserved +1-(408) 577-0100 sales si-micro.com I www.si-micro.com DOC 40DS6960.06 Page 1 www.si-micro.com SM6221, SM6321, SM6421 Series 27 Absolute Maximum Ratings 45 o All parameters are specified at Vdd = 3.3 V supply voltage at 25 C, unless otherwise noted. 131 No. Characteristic Symbol Minimum Typical Maximum Units 1 Supply Voltage V 2.7 6.00 V DD 167 170 2 Supply Current I 2.00 4.00 mA VDD 175 3 Update Period 2 mS 4 Compensated Temperature T -20 +85 C COMP 169 (a) 5 Operating Temperature T -40 +105 C 0 OP 61 (a) 6 Storage Temperature T -40 - +125 C STG (a, c) 7 Proof Pressure P 4.8 psi Proof (a, d) 8 Burst Pressure P 6 psi Burst Notes: a. Tested on a sample basis. b. Clean, dry gas compatible with wetted materials. Wetted materials include silicon, epoxy, RTV, gold and aluminum. c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after returning to the operating pressure range d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device. Silicon Microstructures, Inc. 2001-2017. All rights reserved +1-(408) 577-0100 sales si-micro.com I www.si-micro.com DOC 40DS6960.06 Page 2