Ultra-Low Pressure
27
45
131
Digital Sensor
167 SM9233/SM9235/SM9236 Series
170
Gauge Pressure Sensors
175
FEATURES
169
0
Pressure ranges: 250 up to 600 Pa Gauge
61
Accuracy after Autozero: < 1%FS
2
16 bit I C Digital interface
Pressure calibrated and temperature compensated output
o
Compensated temperature range: -20 to 85 C
DESCRIPTION
Combining the pressure sensor with a signal-conditioning ASIC in a
The SM923x series are digital, ultra-low pressure sensors offering
single package simplifies the use of advanced silicon micro-machined
state-of-the-art MEMS pressure transducer technology and CMOS
pressure sensors. The pressure sensor can be mounted directly on a
mixed signal processing technology to produce a digital, fully
standard printed circuit board and a high level, calibrated pressure
conditioned, multi-order pressure and temperature compensated
signal can be acquired from the digital interface. This eliminates the
sensor in JEDEC standard SOIC-16 package with a dual vertical
need for additional circuitry, such as a compensation network or
porting option. It is available in a gauge pressure configuration.
microcontroller containing a custom correction algorithm.
The total accuracy after board mount and system level autozero is
The SM9233/SM9235/SM9236 are shipped in sticks or tape & reel.
less than 1%FS. The excellent warmup behavior and long term
stability further assures its expected performance over the life of the
part.
Medical Industrial
Sleep Apnea HVAC / VAV
CPAP Airflow Measurement
Ventilators Pressure Transmitters
Gas Flow Instrumentation Pneumatic Gauges
Air Flow Monitors Pressure Switches
Life Sciences Safety Cabinets
Gas Flow Instrumentation
Silicon Microstructures, Inc. 2001-2019. All rights reserved +1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
DOC # 40DS9202.03
Page 1 SM9233/SM9235/SM9236 Series www.si-micro.com
27
1. Absolute Maximum Ratings
45
o
All parameters are specified at Vdd = 3.3 V supply voltage at 25 C, unless otherwise noted.
131
No. Characteristic Symbol Minimum Maximum Units
1 Supply Voltage V 3.0 5.5 V
DD
167
170
2 Digital IO Voltage V -0.3 VDD+0.3 V
IO,DIG
175
3 Max. Digital IO Current (DC) I -10 +10 mA
IO,DIG
(a,b)
4 Storage Temperature T -40 +125 C
STG
169
(a, c)
5 Proof Pressure P 7 (1.0) kPa (PSI)
Proof
0
(a, d)
61 6 Burst Pressure P 20 (2.9) kPa (PSI)
Burst
Notes:
a. Tested on a sample basis.
b. Clean, dry air compatible with wetted materials. Wetted materials include silicon, glass, RTV (silicone), gold, aluminum, copper, nickel,
palladium, epoxy, stainless steel and plastic (mold compound).
c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after
returning to the operating pressure range.
d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.
2. ESD
No. Description Symbol Minimum Maximum Units
2.1 ESD HBM Protection at all Pins V -2 2 kV
ESD(HBM)
3. External Components
No. Description Symbol Min. Typ. Max. Units
*
1 Supply bypass capacitor C 100 nF
VDD
*
2 I2C Data and clock pull up resistors R 4.7 kOhm
P
*
Not tested in production
4. Calibrated Pressure Ranges
Calibrated Pressure Ranges
No. Device Type P (Pa) P (Pa)
MIN MAX
1 SM9233 250 Gauge 0 +250
2 SM9235 300 Gauge 0 +300
3 SM9236 600 Gauge 0 +600
Silicon Microstructures, Inc. 2001-2019. All rights reserved +1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
DOC # 40DS9202.03
Page 2