Pressure MP3V5010 Freescale Semiconductor Rev 0, 4/2009 Integrated Silicon Pressure Sensor MP3V5010 On-Chip Signal Conditioned, Series Temperature Compensated and 0 to 10 kPa (0 to 1.45 psi) Calibrated 0.1 to 3.1 V Output The MP3V5010 series piezoresistive transducers are state-of-the-art monolithic silicon pressure sensors designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D Application Examples inputs. This transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high Hospital Beds level analog output signal that is proportional to the applied pressure. HVAC Respiratory Systems Features Process Control 5.0% Maximum Error Over 0 to 85C Ideally Suited for Microprocessor or Microcontroller-Based Systems Temperature Compensated Over 40 to +125C Thermoplastic (PPS) Surface Mount Package Patented Silicon Shear Stress Strain Gauge Available in Differential and Gauge Configurations ORDERING INFORMATION of Ports Pressure Type Package Case Device Name Device Marking Options No. None Single Dual Gauge Differential Absolute Small Outline Package (MP3V5010 Series) MP3V5010GC6U MP3V5010G Rails 482A MP3V5010GC6T1 MP3V5010G Tape & Reel 482A MP3V5010GP MP3V5010GP Trays 1369 MP3V5010DP MP3V5010DP Trays 1351 MP3V5010GVP MP3V5010GVP Trays 1368 SMALL OUTLINE PACKAGE MP3V5010GC6U/C6T1 MP3V5010GP MP3V5010DP MP3V5010GVP CASE 482A-01 CASE 1369-01 CASE 1351-01 CASE 1368-01 Freescale Semiconductor, Inc., 2009. All rights reserved.Pressure Operating Characteristics Table 1. Operating Characteristics (V = 3.0 Vdc, T = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in S A Figure 3 required to meet specification.) Characteristic Symbol Min Typ Max Unit (1) P 0 10 kPa Pressure Range OP (2) V 2.7 3.0 3.3 Vdc S Supply Voltage Supply Current I 7.0 10 mAdc o (3) V 0.1 0.24 0.38 Vdc Minimum Pressure Offset (0 to 85 C) off V = 3.0 Volts S (4) V 2.81 2.94 3.08 Vdc Full Scale Output (0 to 85 C) FSO V = 3.0 Volts S (5) V 2.7 Vdc Full Scale Span (0 to 85 C) FSS V = 3.0 Volts S (6) %V 5.0 Accuracy (0 to 85 C) FSS Sensitivity V/P 270 mV/kPa (7) t 1.0 ms Response Time R Output Source Current at Full Scale Output I 0.1 mAdc O+ (8) 20 ms Warm-Up Time (9) 0.5 %V Offset Stability FSS 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (V ) is defined as the output voltage at the minimum rated pressure. off 4. Full Scale Output (V ) is defined as the output voltage at the maximum or full rated pressure. FSO 5. Full Scale Span (V ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the FSS minimum rated pressure. 6. Accuracy (error budget) consists of the following: Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25 C. TcSpan: Output deviation over the temperature range of 0 to 85 C, relative to 25 C. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85 C, relative to 25 C. Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V , at 25C. FSS 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset Stability is the product s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MP3V5010 Sensors 2 Freescale Semiconductor