Datasheet SFM3000 Low Pressure Drop Digital Flow Meter Low pressure drop Flow range: +/- 200 slm (bidirectional) Accuracy 1.5% m.v. (typical) Very fast update time (0.5ms) Fully calibrated & temperature compensated Zero offset, no drift Product Summary The SFM3000 sensor is Sensirions digital flow meter The outstanding performance of this sensor is based on designed for high-volume applications. It measures the flow Sensirions patented CMOSens sensor technology, rate of air, oxygen and other non-aggressive gases with which combines the sensor element, signal processing superb accuracy. A special design of the flow channel and digital calibration on a single microchip. The flow rate results in the very low pressure drop through the flow body of the gas is measured by a thermal sensor element which of the sensor making it extremely suitable for very assures very fast signal processing time and bi- demanding applications, such as medical ventilation and directional measurement with best-in-class accuracy. respiratory applications. The well-proven CMOS technology is perfectly suited for The SFM3000 operates from a 5 Volt supply voltage and high-quality mass production and is the ideal choice for 2 features a digital 2-wire I C interface. The measurement demanding and cost-sensitive OEM applications. results are internally linearized and temperature compensated. Applications Sensor chip Medical The SFM3000 flow meter features a fifth-generation silicon sensor chip SF05. In addition to a thermal mass flow Process automation sensor element, the chip contains an amplifier, A/D Burner control converter, EEPROM memory, digital signal processing Fuel cell control circuitry, and interface. Due to seamless integration of Spectroscopy signal acquisition and processing on the single silicon die Environment monitoring significant performance and cost benefits are achieved. Laboratory Connection diagram OEM options A variety of custom options can be implemented for high- VDD volume OEM applications (custom flow rates, calibration 5V for other gases, different body form factor etc.). Contact Sensirion for more information. Micro SDA SFM3000 controller (slave) (master) SCL GND 2 SFM3000 with bidirectional digital communication (I C bus) www.sensirion.com Version 2.2 July 2016 1/7 1. Sensor performance 1 1.1 Physical specifications Parameter Condition Value Unit 2 3 Flow Ranges Air/N /O -200 +200 slm 2 2 Update Time 14 bit 0.5 ms Max. Typ. 8 span 2.5 1.5 % m.v. 4,5,6,7 Accuracy offset 0.1 0.05 slm span 1 0.5 % m.v. 4,7 Repeatability offset 0.05 0.02 slm span 1 0.5 % m.v. 4,7 Noise Level offset 0.1 0.05 slm span 0.75 0.25 Accuracy Shift Due to % m.v./10C 9 Temperature Variation slm offset 0.0 0.0 10 Position sensitivity non-horizontal position < 0.05 slm Pressure Drop 60slm < 100 / < 0.4 Pa / inH O 2 200slm < 600 / < 2.4 1.2 Media compatibility and materials Parameter Value 11 Calibration Air, N , O 2 2 Media Compatibility Air (non-condensing), N , O , non- aggressive gases 2 2 Wetted Materials PPE+PS blend (medical grade: biocompatible ISO 10993 or USP Class VI), Si, Si N , SiO , Gold, Epoxy, Polyurethane, stainless steel (annealed) 3 4 x RoHS, REACH RoHS and REACH compliant Sensor Weight with Cap < 18 gram 1.3 Temperature and pressure conditions Parameter Condition Value Unit 11 Calibrated Temperature Range T(environment) = T(gas) -20 +80 C 11 Operating Temperature Range Non-condensing -20 +80 C Storage Temperature Non-condensing -20 +80 C Operating Pressure Range absolute 0.7 1.3 bar Operating Overpressure gauge 0.2 bar Burst Overpressure gauge > 1 bar 1 Unless otherwise noted, all sensor specifications are valid at 25C with Vdd = 5V and absolute pressure = 966 mbar. 2 Other calibration ranges are available for large volume projects 3 In standard liter per minute at 20C and 1013 mbar 4 With ideal inlet and outlet conditions, at VDD = 5V, 25C, absolute pressure = 966 mbar 5 Including offset, non-linearity, hysteresis 6 Sensor position horizontal (see Section 4.1) 7 Span or offset value, whichever is larger 8 In % of measured value (m.v.) = of rate = of reading 9 Shift due to temperature variation compared to calibration temperature 10 See Section 4.1 11 Contact Sensirion for information about other gases, wider calibrated and operating temperature ranges www.sensirion.com Version 2.2 July 2016 2/7