Low Pressure
Digital & Analog Sensor
SM6291, SM6391, SM6491
Gauge and Differential Pressure Sensor
FEATURES
Pressure range from 0.3 to 0.79 psi; gauge, differential or
asymmetric differential outputs
Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS
16-bit digital, pressure calibrated and temperature
compensated output
I2C and analog Output interface available
Compensated temperature range: -20 to 85C
Robust JEDEC SOIC-16 package for automated assembly
Manufactured according to ISO9001 and ISO/TS 16949
standards
DESCRIPTION Combining the pressure sensor with a signal-conditioning ASIC in a
single package simplifies the use of advanced silicon micro-machined
The SM6X91 series are a low pressure MEMS sensor family offering
state-of-the-art pressure transducer technology and CMOS mixed pressure sensors. The pressure sensor can be mounted directly on a
signal processing technology to produce a digital & analog output, fully standard printed circuit board and a high level, calibrated pressure
conditioned, multi-order pressure and temperature compensated signal can be acquired from the digital interface. This eliminates the
sensor in JEDEC standard SOIC-16 package with a dual vertical or need for additional circuitry, such as a compensation network or
horizontal ports. It is available in gauge, differential, asymmetric microcontroller containing a custom correction algorithm.
differenti al configurations. With the dual porting, a reference
measurement is possible to minimize errors due to changes in
Customer-specified pressure ranges and supply voltages are
ambient pressure.
available.
The SM6291, SM6391 and SM6491 series shipped in sticks or tape &
reel.
Medical Industrial Consumer
Sleep Apnea Airflow Measurement Sports Equipment
CPAP Pneumatic Gauges Appliances
Ventilators Pressure Switches
Gas Flow Instrumentation Safety Cabinets
Air Flow Monitors Life Sciences
Negative Pressure Wound Therapy Gas Flow Instrumentation
Silicon Microstructures, Inc. 2001-2017. All rights reserved.
DOC # 40D6860.02 Page 1 SM6291, SM6391, SM6491 Series
www.si-micro.com
1. Absolute Maximum Ratings
All parameters are specified at VDD = 3.3 V / 5.0 V supply voltage at 25C, unless otherwise noted.
No. Characteristic Symbol Minimum Maximum Units
T
1 Compensated Temperature -20 85 C
COMP
(a)
T
2 -40 105 C
Operating Temperature
OP
(a)
T
3 -40 125 C
Storage Temperature
STG
(a, c)
P
4 4.5 psi
Proof Pressure
Proof
(a, d)
P
5 6 psi
Burst Pressure
Burst
VDD
6 Supply voltage -0.3 6 V
MIN/MAX
7 Media Compatibility(a, b)
Notes:
a. Tested on a sample basis.
b. Clean, dry gas compatible with wetted materials. Wetted materials include silicon, epoxy, RTV, gold and aluminum.
c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after
returning to the operating pressure range
d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.
2. ESD
All parameters are specified at VDD = 3.3 V / 5.0 V supply voltage at 25C, unless otherwise noted.
No. Description Condition Symbol Min. Typ. Max. Units
AEC Q100-002 (HBM)
V
8 ESD HBM Protection at all Pins -2 +2 kV
ESD(HBM)
chip level test
3. Electrical Characteristics
All parameters are specified at VDD = 5.0 V / 3.3 V DC supply voltage at 25C, unless otherwise noted.
No. Description Symbol Min. Typ. Max. Units
4.75 5.0 5.25
V
9 Supply Voltage V
DD
3 3.3 3.6
V 9 0.9 -
10 Low level input voltage at Digital I/O .9 -0.3 -0 V V
IN,I2C,lo o
V 9 VDD + 0.3 -
11 High level input voltage at Digital I/O .9 0.8*VDD -0 V V
IN,I2C,hi o
12 Current Consumption with analog output 4.5 mA
13 Current Consumption without analog output 3 mA
Silicon Microstructures, Inc. 2001-2017. All rights reserved.
DOC # 40DS6860.02 Page 2